Invention Grant
- Patent Title: Direct imaging polymer fluid jet orifice
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Application No.: US10062807Application Date: 2002-02-01
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Publication No.: US06520627B2Publication Date: 2003-02-18
- Inventor: Chien-Hau Chen , Donald E. Wenzel , Qin Liu , Naoto Kawamura , Richard W. Seaver , Carl Wu , Colby Van Vooren , Jeffery S. Hess , Colin C. Davis
- Applicant: Chien-Hau Chen , Donald E. Wenzel , Qin Liu , Naoto Kawamura , Richard W. Seaver , Carl Wu , Colby Van Vooren , Jeffery S. Hess , Colin C. Davis
- Main IPC: B41J205
- IPC: B41J205

Abstract:
A process for creating and an apparatus employing shaped orifices in a semiconductor substrate. A first layer of material is applied on the semiconductor substrate then a second layer of material is then applied upon the first layer of material. An orifice image is then transferred to the first layer of material and a fluid-well image is transferred to the second layer of material. That portion of the second layer of material where the orifice image is located is then developed along with that portion of the first layer of material where the fluid well is located to define an orifice in the substrate.
Public/Granted literature
- US20020071006A1 Direct imaging polymer fluid jet orifice Public/Granted day:2002-06-13
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