发明授权
- 专利标题: Integrated semiconductor optic sensor device
- 专利标题(中): 集成半导体光电传感器装置
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申请号: US09972169申请日: 2001-10-03
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公开(公告)号: US06538267B2公开(公告)日: 2003-03-25
- 发明人: Matteo Bordogna , Enrico Laurin , Oreste Bernardi
- 申请人: Matteo Bordogna , Enrico Laurin , Oreste Bernardi
- 优先权: ITMI99A1680 19990728; EP00104800 20000306
- 主分类号: H01L31072
- IPC分类号: H01L31072
摘要:
The invention relates to a process for manufacturing a light sensor device in a standard CMOS process, including, implanting active areas on a semiconductor substrate to obtain a first integrated region of a corresponding photosensor; and forming a stack of layers having different thickness and refractive index layers over the photosensor to provide interferential filters for the same photosensor. At least one of the above mentioned layers is formed by a transparent metallic oxide having a high refraction index and a corresponding high dielectric constant. In this manner, due to the transparency of the high refraction index material, the design of interferential resonators is rendered more flexible making possible the use of a stack of layers including more than one high refraction index layer.
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