发明授权
US06541709B1 Inherently robust repair process for thin film circuitry using uv laser
失效
使用uv激光器的薄膜电路的固有鲁棒的修复过程
- 专利标题: Inherently robust repair process for thin film circuitry using uv laser
- 专利标题(中): 使用uv激光器的薄膜电路的固有鲁棒的修复过程
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申请号: US08743405申请日: 1996-11-01
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公开(公告)号: US06541709B1公开(公告)日: 2003-04-01
- 发明人: Peter A. Franklin , Arthur G. Merryman , Rajesh S. Patel , Thomas A. Wassick
- 申请人: Peter A. Franklin , Arthur G. Merryman , Rajesh S. Patel , Thomas A. Wassick
- 主分类号: H05K103
- IPC分类号: H05K103
摘要:
A multilayer thin film structure having defined strap repair lines thereon and a method for repairing interconnections in the multilayer thin film structure (MLTF) and/or making engineering changes (EC) are provided. The method determines interconnection defects in the MLTF at a thin film layer adjacent the top metal layer of the structure, defines the top surface metallization including a series of orthogonal X conductor lines and Y conductor lines using photoresist and lithography and additive or subtractive metallization techniques and then uses a phototool to selectively expose the photoresist to define top surface strap connections needed to repair the interconnections and/or make EC's, and forms the top surface metallization.
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