发明授权
- 专利标题: Multiple image photolithography system and method
- 专利标题(中): 多图像光刻系统及方法
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申请号: US09692685申请日: 2000-10-19
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公开(公告)号: US06567153B1公开(公告)日: 2003-05-20
- 发明人: Michael C. Smayling , Frank Tittel , William L. Wilson, Jr.
- 申请人: Michael C. Smayling , Frank Tittel , William L. Wilson, Jr.
- 主分类号: G03B2742
- IPC分类号: G03B2742
摘要:
A multiple image photolithography system includes a radiation source (18) projecting electromagnetic radiation along a path. A reticle cartridge (26) is located in the path of the projected radiation. The cartridge (26) includes a photomask (34,36) located in the path of the projected radiation and a Fabry-Perot interferometer (54) located in the path of the projected radiation. A radiation-sensitive material (30) is located in the path of the projected radiation such that the projected radiation encounters the reticle cartridge (26) before the projected radiation encounters the radiation-sensitive material (30).
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