Invention Grant
- Patent Title: Cell array region of a NOR-type mask ROM device and fabricating method therefor
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Application No.: US10178626Application Date: 2002-06-24
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Publication No.: US06573574B2Publication Date: 2003-06-03
- Inventor: Woon-Kyung Lee
- Applicant: Woon-Kyung Lee
- Priority: KR00-9106 20000224
- Main IPC: H01L2976
- IPC: H01L2976

Abstract:
In a cell array region of a NOR-type mask ROM device and a fabricating method therefor, following formation of a plurality of word lines parallel to one another on a semiconductor substrate, a plurality of sub-bit lines intersecting the top portion of the plurality of word lines at right angles are formed. Trench regions are formed on the semiconductor substrate exposed by the plurality of word lines and the plurality of sub-bit lines. An interlayer insulating layer is formed on the entire surface of the resulting material, and a plurality of bit lines which are parallel to one another are formed on the interlayer insulating layer.
Public/Granted literature
- US20020163034A1 Cell array region of a nor-type mask ROM device and fabricating method therefor Public/Granted day:2002-11-07
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