发明授权
- 专利标题: One-transistor memory cell configuration and method for its fabrication
- 专利标题(中): 单晶体管存储单元配置及其制造方法
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申请号: US10166813申请日: 2002-06-11
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公开(公告)号: US06590249B2公开(公告)日: 2003-07-08
- 发明人: Karl Heinz Küsters , Dietmar Temmler
- 申请人: Karl Heinz Küsters , Dietmar Temmler
- 优先权: DE10128193 20010611
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
In a method for fabricating a dynamic memory cell in a semiconductor substrate having a trench capacitor 1 and a selection transistor 2 and a semiconductor memory having such a memory cell, a dielectric insulator layer 17, 201 is formed between the selection transistor and the trench capacitor, a first electrode region 203 of the selection transistor essentially being arranged above a block-type inner electrode 102 of the trench capacitor and being connected to said electrode via a contact opening 213 in the dielectric insulator layer, said contact opening being provided with an electrically conductive filling layer 214.
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