Invention Grant
- Patent Title: Hidden flexure ultra planar optical routing element
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Application No.: US09859069Application Date: 2001-05-15
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Publication No.: US06608712B2Publication Date: 2003-08-19
- Inventor: M. Adrian Michalicek
- Applicant: M. Adrian Michalicek
- Main IPC: G02B2608
- IPC: G02B2608

Abstract:
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.
Public/Granted literature
- US20020172445A1 Hidden flexure ultra planar optical routing element Public/Granted day:2002-11-21
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