公开(公告)号：US07019885B2

公开(公告)日：2006-03-28

申请号：US10619940

申请日：2003-07-14

Applicant: M. Adrian Michalicek

Inventor： M. Adrian Michalicek

IPC: G02B26/00 ,  H01L41/04

CPC classification number: G02B26/0841

Abstract: The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.

Abstract translation: 本发明提供了改进的MEMS装置和用于光纤通信系统的方法。 在一个实施例中，用于转向光的装置具有带有反射表面的光束层（160）。 该装置使用在光束层下面的多层电极堆叠将光束层旋转到期望的位置。 此外，当设备被激活时，底层旋转和支撑结构为波束层提供了稳定的平台。 在一个实施例中，底层结构提供了多点着陆系统，以在该装置被激活时保持大致平坦的束层上表面。

公开(公告)号：US06028689A

公开(公告)日：2000-02-22

申请号：US788976

申请日：1997-01-24

Applicant: M. Adrian Michalicek ,  Victor M. Bright ,  John H. Comtois

Inventor： M. Adrian Michalicek ,  Victor M. Bright ,  John H. Comtois

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: Provided is a movable micromirror assembly wherein a mirror is mounted on, e.g. four flexible support arms, which are mounted in turn on a center support post. The post and arms resiliently support such mirror over, e.g. four address electrodes. The micromirror device is actuated like a parallel-plate capacitor by applying an address potential to the electrodes, which draw a part or all of the mirror toward same, countered by the spring force of the proximate support arms. Motion of the micromirror can be achieved along two axes since the device can be tilted and retracted according to the varying potentials applied to each of the four electrodes and the attractive force applied in turn to various portions of the micromirror in spaced proximity therewith. The support system of the micromirror is positioned beneath the mirror so that no reflective service area is lost to these features. Accordingly individual micromirror assemblies can be placed close to each other, in side by side array, to maximize the active surface area of such array. Thus each such micromirror can be tilted on two axes to scan one or more fields of regard and also can simultaneously be retracted or elevated to a desired depth to remove phase aberrations in the incident image by discreetly lengthening or shortening the optical path of the image reflected therefrom.

Abstract translation: 提供了可移动微镜组件，其中反射镜安装在例如 四个柔性支撑臂，依次安装在中心支撑柱上。 柱和臂弹性地支撑这样的镜子，例如。 四个地址电极。 通过向电极施加地址电位，使微镜器件像平行板电容器一样被致动，该电极将近似的支撑臂的弹簧力反射到一部分或全部反射镜。 可以沿着两个轴实现微镜的运动，因为可以根据施加到四个电极中的每个电极的变化电位以及依次施加到与其间隔开的微镜的各个部分的吸引力来倾斜和缩回装置。 微镜的支撑系统位于反射镜的下方，这样就不会损失这些特征的反射性服务区域。 因此，单独的微镜组件可以并排布置成彼此靠近，以使该阵列的有效表面积最大化。 因此，每个这样的微镜可以在两个轴上倾斜以扫描一个或多个视场，并且还可以同时缩回或升高到期望的深度，以通过谨慎地延长或缩短反射的图像的光路来消除入射图像中的相位差 由此。

公开(公告)号：US06218205B1

公开(公告)日：2001-04-17

申请号：US09169494

申请日：1998-10-09

Applicant: M. Adrian Michalicek

Inventor： M. Adrian Michalicek

IPC: H01L2100

CPC classification number: B81B7/00 ,  B81B2207/115

Abstract: Post-process deposition of selected material onto MEMS devices is facilitated by photolithographically incorporating deposition shields during the device fabrication process. Subsequently, simple sputtering or evaporating deposition machines can be used to selectively deposit desired materials onto the MEMS devices.

Abstract translation: 通过在器件制造过程中通过光刻法并入沉积屏蔽来促进所选材料的后处理沉积到MEMS器件上。 随后，可以使用简单的溅射或蒸发沉积机器来选择性地将期望的材料沉积到MEMS器件上。

公开(公告)号：US6156652A

公开(公告)日：2000-12-05

申请号：US169495

申请日：1998-10-09

Applicant: M. Adrian Michalicek

Inventor： M. Adrian Michalicek

IPC: B81B7/00 ,  H01L21/82 ,  H01L21/44

CPC classification number: B81B7/0006

Abstract: Large quantities of test MEMS devices are fabricated on a single chip with underlying addressable wiring connections. The wiring contains gaps that can be selectively shorted using a post-process metallization process. Deposition shields are photolithographically incorporated into the MEMS devices during the device fabrication process. These shields contain selected small gaps over certain unconnected wires. Subsequently, simple sputtering or evaporating deposition is used to deposit conductive materials onto the MEMS devices, thereby shorting the unconnected wires. Large quantities of devices can be shorted to active address wires by the metallization process in order of decreasing address potential or by testing preference. As a result, far more devices on a single chip can be individually tested and actuated than the number of bond pads that can be placed around the edge of the chip.

Abstract translation: 大量的测试MEMS器件制造在具有底层可寻址接线连接的单个芯片上。 布线包含可以使用后处理金属化工艺选择性短路的间隙。 沉积屏蔽件在器件制造过程中光刻地并入MEMS器件中。 这些屏蔽在某些未连接的电线上包含选定的小间隙。 随后，使用简单的溅射或蒸发沉积将导电材料沉积到MEMS器件上，从而使未连接的导线短路。 通过金属化处理可以按照降低地址电位或通过测试偏好的顺序将大量器件短接到有源地址线。 因此，单个芯片上的更多器件可以单独测试和启动，而不仅限于可以放置在芯片边缘周围的接合焊盘的数量。

公开(公告)号：US06608712B2

公开(公告)日：2003-08-19

申请号：US09859069

申请日：2001-05-15

Applicant: M. Adrian Michalicek

Inventor： M. Adrian Michalicek

IPC: G02B2608

CPC classification number: G02B26/0841

Abstract: The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.

公开(公告)号：US6040935A

公开(公告)日：2000-03-21

申请号：US237140

申请日：1999-01-25

Applicant: M. Adrian Michalicek

Inventor： M. Adrian Michalicek

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B5/00 ,  G02B26/0841 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/0307 ,  B81B2203/058

Abstract: An array of micromirror devices is fabricated using standard surface-micromachining techniques such that the reflective mirror surfaces are anchored by a trapped joint rather than by rigid support flexures. These devices are therefore multi-stable in actuation rather than continuous like typical micromirror devices in which the restoring spring force of the flexures is used to balance the force of electrostatic actuation. As a result, the flexureless micromirror can be actuated to specific stable positions that make it ideal for optical switching. Since no direct mechanical connection is required to support the mirror surfaces, these devices can be switched between stable positions in binary fashion and at higher speeds.

Abstract translation: 使用标准表面微加工技术制造微镜器件阵列，使得反射镜表面被捕获的接头而不是刚性支撑挠曲锚定。 因此，这些装置在诸如典型的微镜装置中的致动而不是连续地是多稳定的，其中弯曲的恢复弹簧力用于平衡静电致动的力。 因此，柔性微镜可以启动到特定的稳定位置，使其成为光学开关的理想选择。 由于不需要直接的机械连接来支撑镜面，所以这些装置可以在二进制稳定的位置和更高的速度之间切换。