发明授权
US06622286B1 Integrated electronic hardware for wafer processing control and diagnostic
有权
用于晶圆处理控制和诊断的集成电子硬件
- 专利标题: Integrated electronic hardware for wafer processing control and diagnostic
- 专利标题(中): 用于晶圆处理控制和诊断的集成电子硬件
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申请号: US09608599申请日: 2000-06-30
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公开(公告)号: US06622286B1公开(公告)日: 2003-09-16
- 发明人: Tuan Ngo , Farro Kaveh , Connie Lam , Chung-Ho Huang , Tuqiang Ni , Anthony T. Le , Steven Salkow
- 申请人: Tuan Ngo , Farro Kaveh , Connie Lam , Chung-Ho Huang , Tuqiang Ni , Anthony T. Le , Steven Salkow
- 主分类号: G06F1750
- IPC分类号: G06F1750
摘要:
A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.