发明授权
- 专利标题: Method of manufacturing electron emitter and associated display
- 专利标题(中): 制造电子发射器和相关显示器的方法
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申请号: US10234151申请日: 2002-09-05
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公开(公告)号: US06626724B2公开(公告)日: 2003-09-30
- 发明人: Masahiko Yamamoto , Miki Mori , Yumi Fukuda , Hitoshi Kobayashi , Yujiro Hara , Goh Itoh , Masayuki Saito , Toshiro Hiraoka , Koji Asakawa
- 申请人: Masahiko Yamamoto , Miki Mori , Yumi Fukuda , Hitoshi Kobayashi , Yujiro Hara , Goh Itoh , Masayuki Saito , Toshiro Hiraoka , Koji Asakawa
- 优先权: JPP11-069285 19990315
- 主分类号: H01J926
- IPC分类号: H01J926
摘要:
A display device has an array formed on a substrate including a cathode wiring line layer, a gate wiring line layer and an insulating layer for electrically insulating the cathode wiring line layer and the gate wiring line layer from each other. Holes are formed at the crossing portion between the cathode wiring line layer and the gate wiring line layer so as to penetrate through the insulating layer, and resistive layer and an emitter layer are provided in the holes. The resistive layer has such a structure that conductive fine particles are dispersed in a base material of insulating fine particles, and the emitter layer is formed of a fine particle material. The insulating layer between the cathode electrode lines and the gate electrodes is formed of a silicon oxide film containing fluorine. When a large number of elements are formed over a large area in an electron emission device using fine particle emitters, there can be provided electron emission elements which can suppress the unevenness of the electron emission amount. According to the present invention, there can be provided a large-area and uniform display device which can be operated with a low driving voltage, and have a long lifetime.
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