发明授权
US06639784B1 Wedge-shaped high density capacitor and method of making the capacitor
有权
楔形高密度电容器和制造电容器的方法
- 专利标题： Wedge-shaped high density capacitor and method of making the capacitor
- 专利标题（中）： 楔形高密度电容器和制造电容器的方法
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申请号： US10283810申请日： 2002-10-30
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公开(公告)号： US06639784B1公开(公告)日： 2003-10-28
- 发明人: Peter Hopper , Philipp Lindorfer , Kyuwoon Hwang , Andy Strachan , Vladislav Vashchenko
- 申请人： Peter Hopper , Philipp Lindorfer , Kyuwoon Hwang , Andy Strachan , Vladislav Vashchenko
- 主分类号： H01J4228
- IPC分类号： H01J4228
摘要：
A capacitor structure is formed in a wedge-shaped trench by forming alternating layers of insulating material and conductive material in the trench such that each layer of conductive material formed in the trench is electrically isolated from adjacent layers of conductive material formed in the trench. A first electrical contact is formed to electrically link in parallel a first set of alternating layers of conductive material. A second electrical contact is formed to electrically link in parallel a second set of alternating layers of conductive material. The two electrically isolated sets of inter-linked layers of conductive material define the interdigitated capacitor structure.
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