Invention Grant
US06642116B2 Method for fabricating a split gate flash memory cell 有权
分离栅闪存单元的制造方法

  • Patent Title: Method for fabricating a split gate flash memory cell
  • Patent Title (中): 分离栅闪存单元的制造方法
  • Application No.: US10191108
    Application Date: 2002-07-08
  • Publication No.: US06642116B2
    Publication Date: 2003-11-04
  • Inventor: Chi-Hui Lin
  • Applicant: Chi-Hui Lin
  • Priority: TW90122689A 20010913
  • Main IPC: H01L21336
  • IPC: H01L21336
Method for fabricating a split gate flash memory cell
Abstract:
A method of fabricating flash memory cell is described. The method includes the steps of providing a semiconductor substrate; forming a first gate insulating layer; forming a first conductive layer; forming a buffer layer; removing portions of the buffer layer to farm a floating gate insulating layer; forming a second conductive layer; removing portions of the first conductive layer and the second conductive layer, such that the second conductive layer forms conductive spacers having conductive tips situated at the tips, and the floating gate insulating layer, the floating gate and the first gate insulating layer are combined as a floating gate region; forming a second insulating layer; forming a third conductive layer; removing portions of the third conductive layer and the second insulating layer to form a control gate, a second gate insulating layer, a first opening and a second opening; forming a source region on the substrate; forming spacers; and forming a drain region on the substrate.
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