Invention Grant
- Patent Title: Embedded metal nanocrystals
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Application No.: US09911378Application Date: 2001-07-25
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Publication No.: US06646302B2Publication Date: 2003-11-11
- Inventor: Edwin C. Kan , Zengtao Liu , Venkatasubraman Narayanan
- Applicant: Edwin C. Kan , Zengtao Liu , Venkatasubraman Narayanan
- Main IPC: H01L29788
- IPC: H01L29788

Abstract:
Low resistance metal/semiconductor and metal/insulator contacts incorporate metal nanocrystals embedded in another metal having a different work function. The contacts are fabricated by placing a wetting layer of a first metal on a substrate, which may be a semiconductor or an insulator and then heating to form nanocrystals on the semiconductor or insulator surface. A second metal having a different work function than the first is then deposited on the surface so that the nanocrystals are embedded in the second material.
Public/Granted literature
- US20020061646A1 Embedded metal nanocrystals Public/Granted day:2002-05-23
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