发明授权
US06647766B2 Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
有权
用于接触和/或改变具有悬臂的表面的装置和用于生产所述悬臂的方法
- 专利标题: Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
- 专利标题(中): 用于接触和/或改变具有悬臂的表面的装置和用于生产所述悬臂的方法
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申请号: US09745273申请日: 2000-12-20
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公开(公告)号: US06647766B2公开(公告)日: 2003-11-18
- 发明人: Michel Despont , Ute Drechsler , Mark I. Lutwyche , Hugo E. Rothuizen , Peter Vettiger
- 申请人: Michel Despont , Ute Drechsler , Mark I. Lutwyche , Hugo E. Rothuizen , Peter Vettiger
- 优先权: EP99126244 19991231
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
A device for contacting and/or modifying a surface having a cantilever connected to an almost plane carrier element staying apart from said surface, said cantilever having a tip at its loose end being in close contact to said surface. It is proposed that the cantilever stand out of the plane of said carrier element. Further, a method for producing the cantilever having a tip at its loose end. The device is suitable for thermomechanical writing and thermal readout of binary information, lithographic and imaging techniques, and for surface modification.
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