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US06656840B2 Method for forming silicon containing layers on a substrate 失效
在基板上形成含硅层的方法

Method for forming silicon containing layers on a substrate
摘要:
A method for forming a microelectronics device is disclosed. In one embodiment, the method includes depositing a conductive structure on a substrate. A first layer comprising silicon and nitrogen is formed on the substrate. A second layer comprising silicon and nitrogen is then formed on the first layer. The nitrogen to silicon ratio in the first layer is greater than the nitrogen to silicon ratio in the second layer.
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