发明授权
- 专利标题: Method for forming silicon containing layers on a substrate
- 专利标题(中): 在基板上形成含硅层的方法
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申请号: US10136455申请日: 2002-04-29
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公开(公告)号: US06656840B2公开(公告)日: 2003-12-02
- 发明人: Nagarajan Rajagopalan , Joe Feng , Christopher S Ngai , Meiyee (Maggie Le) Shek , Suketu A Parikh , Linh H Thanh
- 申请人: Nagarajan Rajagopalan , Joe Feng , Christopher S Ngai , Meiyee (Maggie Le) Shek , Suketu A Parikh , Linh H Thanh
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
A method for forming a microelectronics device is disclosed. In one embodiment, the method includes depositing a conductive structure on a substrate. A first layer comprising silicon and nitrogen is formed on the substrate. A second layer comprising silicon and nitrogen is then formed on the first layer. The nitrogen to silicon ratio in the first layer is greater than the nitrogen to silicon ratio in the second layer.
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