发明授权
- 专利标题: Inspecting method and apparatus for repeated micro-miniature patterns
- 专利标题(中): 用于重复微型图案的检查方法和装置
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申请号: US09127960申请日: 1998-08-03
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公开(公告)号: US06661912B1公开(公告)日: 2003-12-09
- 发明人: Junichi Taguchi , Aritoshi Sugimoto , Masami Ikota , Yuko Inoue , Tetsuya Watanabe , Wakana Shinke
- 申请人: Junichi Taguchi , Aritoshi Sugimoto , Masami Ikota , Yuko Inoue , Tetsuya Watanabe , Wakana Shinke
- 主分类号: G06K900
- IPC分类号: G06K900
摘要:
An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.