公开(公告)号：US06661912B1

公开(公告)日：2003-12-09

申请号：US09127960

申请日：1998-08-03

申请人： Junichi Taguchi ,  Aritoshi Sugimoto ,  Masami Ikota ,  Yuko Inoue ,  Tetsuya Watanabe ,  Wakana Shinke

发明人： Junichi Taguchi ,  Aritoshi Sugimoto ,  Masami Ikota ,  Yuko Inoue ,  Tetsuya Watanabe ,  Wakana Shinke

IPC分类号： G06K900

CPC分类号： G06T7/0004 ,  G01N21/95607 ,  G06T7/001 ,  G06T2207/30148

摘要： An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.

摘要翻译： 一种用于检查形成在待检查物体的表面上的重复微型图案中的异物的装置，包括：检查光照明装置，用于照射指向被检查物体的表面的检查光，其上重复 形成微型图案; 用于检测检查光的散射光的散射光检测器，散射在被检查物体的表面上; 用于根据所述散射光检测器对所述散射光的检测获得的用于获得与附着在所述被检查物体的表面上的异物有关的第一信息的装置; 照明装置，用于在其上形成有重复的微型图案的被检查物体的表面上施加明场照明; 用于在所述照明装置的明场照明下拾取异物的图像的装置; 用于根据所述异物的图像获得与所述异物相关的第二信息的装置，其基于在所述明场照明下的所述图像拾取装置的所述图像拾取而获得; 以及用于在其显示屏幕上显示与所述异物相关的所述第一信息和所述第二信息的装置。

公开(公告)号：US06944325B2

公开(公告)日：2005-09-13

申请号：US10656221

申请日：2003-09-08

申请人： Junichi Taguchi ,  Aritoshi Sugimoto ,  Masami Ikoto ,  Yuko Inoue ,  Tetsuya Watanabe ,  Wakana Shinke

发明人： Junichi Taguchi ,  Aritoshi Sugimoto ,  Masami Ikoto ,  Yuko Inoue ,  Tetsuya Watanabe ,  Wakana Shinke

IPC分类号： G01N21/956 ,  G06T7/00 ,  G06K9/00

CPC分类号： G06T7/0004 ,  G01N21/95607 ,  G06T7/001 ,  G06T2207/30148

摘要： An apparatus for inspecting foreign matter in repeated micro-miniature patterns formed upon a surface of an object to be inspected, comprising: an inspection light illuminating device for irradiating an inspection light directed upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; a scattered light detector for detecting scattered light of the inspection light being scattered upon the surface said object to be inspected; means for obtaining a first information related to a foreign matter attaching upon the surface of said object to be inspected, which is obtained on a basis of the detection of said scattered light by said scattered light detector; an illumination means for applying a bright field illumination upon the surface of the object to be inspected, on which the repeated micro-miniature patterns are formed; means for picking up the image of the foreign matter, under a bright field illumination by said illumination means; means for obtaining a second information related to said foreign matter, depending upon an image of said foreign matter, which is obtained on a basis of said picking up of the image by said image picking up means under the bright field illumination; and means for displaying said first information and said second information, both being related to said foreign matter, on a display screen thereof.

摘要翻译： 一种用于检查形成在待检查物体的表面上的重复微型图案中的异物的装置，包括：检查光照明装置，用于照射指向被检查物体的表面的检查光，其上重复 形成微型图案; 用于检测检查光的散射光的散射光检测器，散射在被检查物体的表面上; 用于根据所述散射光检测器对所述散射光的检测获得的用于获得与附着在所述被检查物体的表面上的异物有关的第一信息的装置; 照明装置，用于在其上形成有重复的微型图案的被检查物体的表面上施加明场照明; 用于在所述照明装置的明场照明下拾取异物的图像的装置; 用于根据所述异物的图像获得与所述异物相关的第二信息的装置，其基于在所述明场照明下的所述图像拾取装置的所述图像拾取而获得; 以及用于在其显示屏幕上显示与所述异物相关的所述第一信息和所述第二信息的装置。