Invention Grant
- Patent Title: Semiconductor component having double passivating layers formed of two passivating layers of different dielectric materials
- Patent Title (中): 半导体元件具有由两种不同介电材料的钝化层形成的双钝化层
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Application No.: US09757328Application Date: 2001-01-09
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Publication No.: US06664612B2Publication Date: 2003-12-16
- Inventor: Josef Willer , Paul-Werner Von Basse , Thomas Scheiter
- Applicant: Josef Willer , Paul-Werner Von Basse , Thomas Scheiter
- Priority: DE19830832 19980709
- Main IPC: H01L2358
- IPC: H01L2358

Abstract:
A semiconductor component with passivation includes at least two double passivating layers, of which an uppermost is applied to a planar surface of a layer located therebelow. The double passivating layers include two layers of different dielectric materials, for example silicon oxide and silicon nitride. The respective thicknesses of the individual passivating layers can be adapted to dimensions of the structuring of the layer to which the passivation is applied. This produces a reliable passivation which is particularly suitable for capacitively measuring fingerprint sensors.
Public/Granted literature
- US20010019168A1 Semiconductor component with passivation Public/Granted day:2001-09-06
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