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US06664612B2 Semiconductor component having double passivating layers formed of two passivating layers of different dielectric materials 失效
半导体元件具有由两种不同介电材料的钝化层形成的双钝化层

Semiconductor component having double passivating layers formed of two passivating layers of different dielectric materials
Abstract:
A semiconductor component with passivation includes at least two double passivating layers, of which an uppermost is applied to a planar surface of a layer located therebelow. The double passivating layers include two layers of different dielectric materials, for example silicon oxide and silicon nitride. The respective thicknesses of the individual passivating layers can be adapted to dimensions of the structuring of the layer to which the passivation is applied. This produces a reliable passivation which is particularly suitable for capacitively measuring fingerprint sensors.
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