- 专利标题: Hardware assembly for CVI/CVD processes
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申请号: US09933465申请日: 2001-08-20
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公开(公告)号: US06669988B2公开(公告)日: 2003-12-30
- 发明人: David E. Daws , James W. Rudolph , Dary Zeigler , Afshin Bazshushtari
- 申请人: David E. Daws , James W. Rudolph , Dary Zeigler , Afshin Bazshushtari
- 主分类号: C23C1626
- IPC分类号: C23C1626
摘要:
A hardware assembly is provided for controlling a first portion of gas and a second portion of gas in a furnace. The first portion of the gas is introduced to a center opening region of a stack of porous structures. The second portion of the gas is introduced to an outer region of the stack of porous structures. Most of the gas flows out of the hardware assembly from either the center opening region or the outer region while some of the gas flows out through small holes from the other region. A densification method is also provided with two densification processes in which the gas flows in opposite directions in the two densification processes.
公开/授权文献
- US20030035893A1 Hardware assembly for CVI/CVD processes 公开/授权日:2003-02-20
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