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    Pressure gradient CVI/CVD process
    1.
    发明授权
    Pressure gradient CVI/CVD process 有权
    压力梯度CVI / CVD工艺

    公开(公告)号：US07892646B1

    公开(公告)日：2011-02-22

    申请号：US12109946

    申请日：2008-04-25

    申请人： James W. Rudolph ,  Vincent Fry

    发明人： James W. Rudolph ,  Vincent Fry

    IPC分类号： B32B9/00

    CPC分类号： C23C16/045 ,  C23C16/45557 ,  F16D65/12 ,  F16D2200/0052 ,  Y10T428/30

    摘要： A pressure gradient CVI/CVD process includes providing a furnace defining an outer volume. Porous structures and ring-like spacers are assembled in a stack with a ring-like spacer between each adjacent pair of porous structures. The stack of porous structures is disposed between a bottom plate and a top plate in the furnace, wherein the bottom plate, the stack of porous structures, and the ring-like spacers define an enclosed cavity. A channel provides fluid communication between the enclosed cavity and the outer volume. A gas composition is introduced into the enclosed cavity. A portion of the gas composition flows through the channel. A pressure gradient is maintained between the enclosed cavity and the outer volume. The gas composition in the outer volume is provided at a pressure of at least about 15 torr. The porous structures are densified.

    摘要翻译： 压力梯度CVI / CVD工艺包括提供限定外部体积的炉。 多孔结构和环状间隔物在每个相邻的一对多孔结构之间以一个环形隔离物堆叠组装。 多孔结构的堆叠被布置在炉中的底板和顶板之间，其中底板，多孔结构的堆叠和环形间隔件限定封闭的腔。 通道提供封闭空腔和外部容积之间的流体连通。 将气体组合物引入封闭空腔中。 一部分气体组成流过通道。 在封闭空腔和外部体积之间保持压力梯度。 外部体积中的气体组成设置在至少约15托的压力下。 多孔结构致密化。

    Non-pressure gradient single cycle CVI/CVD apparatus and method
    8.
    发明授权
    Non-pressure gradient single cycle CVI/CVD apparatus and method 有权
    非压力梯度单循环CVI / CVD装置及方法

    公开(公告)号：US08057855B1

    公开(公告)日：2011-11-15

    申请号：US12168592

    申请日：2008-07-07

    申请人： James W. Rudolph ,  Vincent R. Fry

    发明人： James W. Rudolph ,  Vincent R. Fry

    IPC分类号： C23C16/00

    CPC分类号： C04B35/83 ,  C04B2235/608 ,  C04B2235/614 ,  C04B2235/77 ,  C23C16/045 ,  C23C16/26 ,  C23C16/4557

    摘要： A process for densifying porous structures inside a furnace using non-pressure gradient CVI/CVD includes disposing a number of porous structures in a stack within a furnace. The stack has a center opening region extending through the porous structures and an outer region extending along the outside of the porous structures. Channels provide fluid communication between the center opening region and the outer region. A first portion of a gas composition is introduced to the center opening region. A second portion of the gas composition is introduced to the outer region. The porous structures are densified from an average density of less than 0.60 g/cm3 to an average density of greater than 1.70 g/cm3 in a single cycle of non-pressure gradient CVI/CVD.

    摘要翻译： 使用非压力梯度CVI / CVD在炉内致密多孔结构的方法包括在炉内的堆叠中设置多个多孔结构。 堆叠具有延伸穿过多孔结构的中心开口区域和沿着多孔结构的外部延伸的外部区域。 通道在中心开口区域和外部区域之间提供流体连通。 将气体组合物的第一部分引入中心开口区域。 将气体组合物的第二部分引入外部区域。 在非压力梯度CVI / CVD的单周期中，多孔结构从平均密度小于0.60g / cm 3致密化至大于1.70g / cm 3的平均密度。

    Method for measurement of weight during a CVI/CVD process
    9.
    发明授权
    Method for measurement of weight during a CVI/CVD process 有权
    在CVI / CVD过程中测量重量的方法

    公开(公告)号：US07476419B2

    公开(公告)日：2009-01-13

    申请号：US11698227

    申请日：2007-01-25

    申请人： James W. Rudolph ,  David E. Daws ,  Dary Zeigler ,  Afshin Bazshushtari

    发明人： James W. Rudolph ,  David E. Daws ,  Dary Zeigler ,  Afshin Bazshushtari

    IPC分类号： C23C16/26 ,  G01G19/00

    CPC分类号： G01G17/04 ,  C23C16/045 ,  F16D69/023 ,  Y10S427/10

    摘要： A method of chemical vapor infiltration and deposition includes stacking a number of porous structures in a stack in a furnace. The stack has a center opening region extending through the porous structures and an outer region extending along the porous structures. A first portion of a reactant gas is introduced to the center opening region. A second portion of the reactant gas is introduced to the outer region. The first portion and the second portion are controlled proportions thereby introducing predetermined portions of the reactant gas to both the center opening region and the outer region. The change in weight of the entire furnace, including contents, is measured during the chemical vapor infiltration and deposition process. The rate of weight change is monitored.

    摘要翻译： 化学气相渗透和沉积的方法包括在炉中堆叠多个多孔结构体。 堆叠具有延伸穿过多孔结构的中心开口区域和沿着多孔结构延伸的外部区域。 将反应气体的第一部分引入中心开口区域。 反应气体的第二部分被引入外部区域。 第一部分和第二部分是受控比例，从而将反应气体的预定部分引入中心开口区域和外部区域。 在化学气相渗透和沉积过程中测量整个炉的重量变化（包括含量）。 监测体重变化率。

    Pressure gradient CVI/CVD apparatus and method
    10.
    发明授权
    Pressure gradient CVI/CVD apparatus and method 有权
    压力梯度CVI / CVD装置及方法

    公开(公告)号：US07335397B2

    公开(公告)日：2008-02-26

    申请号：US10780265

    申请日：2004-02-16

    申请人： James W. Rudolph ,  Paul T. Perea ,  John S. Linck ,  Chris T. Kirkpatrick ,  Richard Jones

    发明人： James W. Rudolph ,  Paul T. Perea ,  John S. Linck ,  Chris T. Kirkpatrick ,  Richard Jones

    IPC分类号： C23C16/00

    CPC分类号： C23C16/045 ,  Y10S427/10

    摘要： An apparatus and method for densifying porous structures inside a furnace using pressure gradient CVI/CVD. The apparatus includes a stack of porous structures where each porous structure has an aperture therethrough. The apparatus also includes at least one ring-like spacer disposed within the stack of porous structures between neighboring porous structures. The ring-like spacer encircles the apertures of the neighboring porous structures. The stack of porous structures and the at least one ring-like spacer define an enclosed cavity including each porous structure aperture. A channel provides fluid communication between the enclosed cavity and an outer volume defined by the interior surface of the furnace.

    摘要翻译： 使用压力梯度CVI / CVD致密化炉内多孔结构的装置和方法。 该装置包括一堆多孔结构，其中每个多孔结构具有穿过其中的孔。 该设备还包括设置在相邻多孔结构之间的多孔结构堆叠内的至少一个环状间隔物。 环形间隔件围绕相邻多孔结构的孔。 多孔结构的堆叠和至少一个环形间隔件限定包括每个多孔结构孔的封闭空腔。 通道提供封闭空腔与由炉内表面限定的外部容积之间的流体连通。