发明授权
- 专利标题: Synthetic quartz glass optical material and optical member
- 专利标题(中): 合成石英玻璃光学材料和光学元件
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申请号: US10048309申请日: 2002-01-29
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公开(公告)号: US06689705B2公开(公告)日: 2004-02-10
- 发明人: Akira Fujinoki , Hiroyuki Nishimura , Toru Yokota , Yasuyuki Yaginuma , Akira Sato , Tetsuji Ueda
- 申请人: Akira Fujinoki , Hiroyuki Nishimura , Toru Yokota , Yasuyuki Yaginuma , Akira Sato , Tetsuji Ueda
- 优先权: JP2000-158943 20000529
- 主分类号: C03C306
- IPC分类号: C03C306
摘要:
An object of the present invention is to provide a synthetic quartz glass optical material having a high optical transmittance for a radiation 157 nm in wavelength emitted from F2 excimer laser and a high resistance against irradiation of a F2 excimer laser radiation, yet having a uniformity suitable for such a fine patterning using a F2 excimer laser, and to provide an optical member using the same. The problems above are solved by a synthetic quartz glass optical material for F2 excimer lasers having an OH group concentration of 0.5 ppm or lower, a fluorine concentration of 0.1 to 2 mol %, a hydrogen molecule concentration of 5×1016 molecules/cm3 or lower, a difference between the maximum and minimum fluorine concentrations within 20 mol ppm, and a difference between the maximum and minimum refraction indices of 2×10−5 or lower.
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