发明授权
- 专利标题: Method of making a bump on a substrate without ribbon residue
- 专利标题(中): 在没有带残留物的基板上形成凸块的方法
-
申请号: US10038847申请日: 2001-12-31
-
公开(公告)号: US06696356B2公开(公告)日: 2004-02-24
- 发明人: Li-Hsin Tseng , Hsiu-Mei Yu , Ta-Yang Lin , Fang-Chung Liu , Kai-Ming Ching , Tung-Heng Shie
- 申请人: Li-Hsin Tseng , Hsiu-Mei Yu , Ta-Yang Lin , Fang-Chung Liu , Kai-Ming Ching , Tung-Heng Shie
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
A method of forming a bump on a substrate such as a semiconductor wafer or flip chip without producing metal ribbon residue. The method includes the step of providing a semiconductor device having a contact pad and having an upper passivation layer and an opening formed in the upper passivation layer exposing a portion of the contact pad. An under bump metallurgy is deposited over the upper passivation layer and the contact pad. A photoresist layer is deposited over the under bump metallurgy. The photoresist layer is a dry film photoresist. The photoresist layer is patterned to provide an opening in the photoresist layers down to the under bump metallurgy and aligned with the contact pad. Additional energy is applied to the photoresist layer to improve the adhesion of the photoresist layer to the under bump metallurgy. An electrically conductive material is deposited into the opening formed in the photoresist layers and overlying the under bump metallurgy and aligned with contact pad. Thereafter the remaining portions of the photoresist layer are removed. The electrically conductive material is reflown to provide a bump on the semiconductor device.
公开/授权文献
信息查询