发明授权
US06706202B1 Method for shaped optical MEMS components with stressed thin films
失效
具有应力薄膜的成形光学MEMS部件的方法
- 专利标题： Method for shaped optical MEMS components with stressed thin films
- 专利标题（中）： 具有应力薄膜的成形光学MEMS部件的方法
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申请号： US09672386申请日： 2000-09-28
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公开(公告)号： US06706202B1公开(公告)日： 2004-03-16
- 发明人: Decai Sun , Michel A. Rosa , Eric Peeters , Francesco Lemmi , Patrick Y. Maeda , Christopher L. Chua
- 申请人： Decai Sun , Michel A. Rosa , Eric Peeters , Francesco Lemmi , Patrick Y. Maeda , Christopher L. Chua
- 主分类号： B81B702
- IPC分类号： B81B702
摘要：
A method is disclosed for making shaped optical moems components with stressed thin films. In particular, stressed thin films are used to make mirror structures.