发明授权
- 专利标题: One transistor cell FeRAM memory array
- 专利标题(中): 一个晶体管单元FeRAM存储器阵列
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申请号: US10282985申请日: 2002-10-28
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公开(公告)号: US06711049B1公开(公告)日: 2004-03-23
- 发明人: Sheng Teng Hsu , Jong-Jan Lee , Fengyan Zhang , Nobuyoshi Awaya
- 申请人: Sheng Teng Hsu , Jong-Jan Lee , Fengyan Zhang , Nobuyoshi Awaya
- 主分类号: G11C1122
- IPC分类号: G11C1122
摘要:
A one-transistor FeRAM memory cell array includes an array of ferroelectric transistors arranged in rows and columns, each transistor having a source, a drain, a channel, a gate oxide layer over the channel and a ferroelectric stack formed on the gate oxide layer; word lines connecting the gate ferroelectric stack top electrodes of transistors in a row of the array; a connection to the channel of all transistors in the array formed by a substrate well; a set of first bit lines connecting the sources of all transistors in a column of the array; and a set of second bit lines connecting the drains of all transistors in a column of the array; wherein the ferroelectric stack has opposed edges, which, when projected to a level of the source, drain and channel, are coincident with an abutted edge of the source and the channel and the drain and the channel, respectively.
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