Invention Grant
US06721618B2 System and method for automatically generating semiconductor equipment communication standard (SECS) message source in SECS communication
有权
在SECS通信中自动生成半导体设备通信标准（SECS）消息源的系统和方法
- Patent Title: System and method for automatically generating semiconductor equipment communication standard (SECS) message source in SECS communication
- Patent Title (中): 在SECS通信中自动生成半导体设备通信标准（SECS）消息源的系统和方法
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Application No.: US10178556Application Date: 2002-06-25
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Publication No.: US06721618B2Publication Date: 2004-04-13
- Inventor: Wonin Baek , Jaekwang Lee , Dongsik Min , Jaegwang Lee , Kyuheung Lee
- Applicant: Wonin Baek , Jaekwang Lee , Dongsik Min , Jaegwang Lee , Kyuheung Lee
- Priority: KR2001-0037988 20010629; KR2002-0002269 20020115
- Main IPC: G06F1900
- IPC: G06F1900
Abstract:
A system and method for automatically generating software such that coding of a source program for use in controlling equipments may be automatically performed to the selection of data corresponding to a SECS message defining operations of the semiconductor fabricating equipments in the SECS message communications for a semiconductor fabricating or processing system. According to the present invention, it is possible to rapidly automate the equipment and perform ease maintenance and repair of the fabricating equipments and provide a more static environment for fabricating the semiconductor.
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