公开(公告)号：US06721618B2

公开(公告)日：2004-04-13

申请号：US10178556

申请日：2002-06-25

Applicant: Wonin Baek ,  Jaekwang Lee ,  Dongsik Min ,  Jaegwang Lee ,  Kyuheung Lee

Inventor： Wonin Baek ,  Jaekwang Lee ,  Dongsik Min ,  Jaegwang Lee ,  Kyuheung Lee

IPC: G06F1900

CPC classification number: G06F8/71 ,  G05B2219/31202 ,  H04Q2213/13322

Abstract: A system and method for automatically generating software such that coding of a source program for use in controlling equipments may be automatically performed to the selection of data corresponding to a SECS message defining operations of the semiconductor fabricating equipments in the SECS message communications for a semiconductor fabricating or processing system. According to the present invention, it is possible to rapidly automate the equipment and perform ease maintenance and repair of the fabricating equipments and provide a more static environment for fabricating the semiconductor.

Abstract translation: 一种用于自动生成软件的系统和方法，可以自动执行用于控制设备的源程序的编码以选择对应于SECS消息的数据，该SECS消息定义了用于半导体制造的SECS消息通信中的半导体制造设备的操作 或处理系统。 根据本发明，可以使设备快速自动化，并且对制造设备进行易维护和维修，并为制造半导体提供更静态的环境。