发明授权
US06724018B2 Zn1-xMgxSySe1-y pin-photodiode and Zn1-xMgxSySe1-y avalanche-photodiode
失效
Zn1-xMgxSySe1-y针光电二极管和Zn1-xMgxSySe1-y雪崩光电二极管
- 专利标题: Zn1-xMgxSySe1-y pin-photodiode and Zn1-xMgxSySe1-y avalanche-photodiode
- 专利标题(中): Zn1-xMgxSySe1-y针光电二极管和Zn1-xMgxSySe1-y雪崩光电二极管
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申请号: US10228289申请日: 2002-08-27
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公开(公告)号: US06724018B2公开(公告)日: 2004-04-20
- 发明人: Koshi Ando , Takao Nakamura
- 申请人: Koshi Ando , Takao Nakamura
- 优先权: JP2001-270031 20010906; JP2001-324341 20011023
- 主分类号: H01L310328
- IPC分类号: H01L310328
摘要:
A blue-violet-near-ultraviolet pin-photodiode with small dark current, high reliability and long lifetime. The pin-photodiode has a metallic n-electrode, a n-ZnSe single crystal substrate, an optionally added n-ZnSe buffer layer, an n-Zn1-xMgxSySe1-y layer, an i-Zn1-xMgxSySe1-y layer, a p-Zn1-xMgxSySe1-y layer, a p-(ZnTe/ZnSe)m SLE, a p-ZnTe contact layer, an optionally provided antireflection film and a metallic p-electrode. A blue-violet-near-ultraviolet avalanche photodiode with small dark current, high reliability and long lifetime. The avalanche photodiode has a metallic n-electrode, a n-ZnSe single crystal substrate, an optionally added n-ZnSe buffer layer, an n-Zn1-xMgxSySe1-y layer, an i-Zn1-xMgxSySe1-y layer, a p-Zn1-xMgxSySe1-y layer, a p-(ZnTe/ZnSe)m SLE, a p-ZnTe contact layer, an optionally provided antireflection film and a metallic p-electrode. Upper sides of the layered structure are etched into a mesa-shape and coated with insulating films.
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