Invention Grant
- Patent Title: Ion-source neutralization with a hot-filament cathode-neutralizer
- Patent Title (中): 用热丝阴极中和器进行离子源中和
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Application No.: US10404162Application Date: 2003-04-01
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Publication No.: US06724160B2Publication Date: 2004-04-20
- Inventor: Harold R. Kaufman , James R. Kahn , Viacheslav V. Zhurin
- Applicant: Harold R. Kaufman , James R. Kahn , Viacheslav V. Zhurin
- Main IPC: H01J2300
- IPC: H01J2300

Abstract:
In accordance with one embodiment of the present invention, the ion-beam apparatus takes the form of a gridless ion source with a hot-filament cathode-neutralizer, in which the hot filament is heated with a current from the cathode-neutralizer heater. The cathode-neutralizer is connected to the negative terminal of the discharge supply for the gridless ion source. This connection is substantially isolated from ground (the potential of the surrounding vacuum chamber, which is usually at earth ground) and its potential is measured relative to ground. The heater current to the cathode-neutralizer is controlled by adjusting it so as to maintain this potential in a narrow operating range. This control can be manual or automatic.
Public/Granted literature
- US20030193295A1 Ion-source neutralization with a hot-filament cathode-neutralizer Public/Granted day:2003-10-16
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