公开(公告)号：US06683425B1

公开(公告)日：2004-01-27

申请号：US10068772

申请日：2002-02-05

Applicant: Kwok F. Lai

Inventor： Kwok F. Lai

IPC: H01J2300

CPC classification number: H01J37/3405 ,  H01J37/3423

Abstract: In one embodiment, a magnetron apparatus includes an essentially flat target having a low height-to-width ratio. The essentially flat target may be planar, dish-shaped, or stepped-shape, for example. A main magnet is located behind the flat target to provide main magnetic fields. Magnets located near the target and underneath a substrate may be configured to maintain a high density plasma and to control the flow of plasma onto the substrate.

Abstract translation: 在一个实施例中，磁控管装置包括具有低高度比宽度的基本平坦的靶。 例如，基本平坦的靶可以是平面的，盘形的或阶梯状的。 主磁体位于平面目标的后面，以提供主磁场。 位于目标附近和衬底下方的磁体可被配置为保持高密度等离子体并且控制等离子体在衬底上的流动。

公开(公告)号：US06724160B2

公开(公告)日：2004-04-20

申请号：US10404162

申请日：2003-04-01

Applicant: Harold R. Kaufman ,  James R. Kahn ,  Viacheslav V. Zhurin

Inventor： Harold R. Kaufman ,  James R. Kahn ,  Viacheslav V. Zhurin

IPC: H01J2300

CPC classification number: H01J27/14

Abstract: In accordance with one embodiment of the present invention, the ion-beam apparatus takes the form of a gridless ion source with a hot-filament cathode-neutralizer, in which the hot filament is heated with a current from the cathode-neutralizer heater. The cathode-neutralizer is connected to the negative terminal of the discharge supply for the gridless ion source. This connection is substantially isolated from ground (the potential of the surrounding vacuum chamber, which is usually at earth ground) and its potential is measured relative to ground. The heater current to the cathode-neutralizer is controlled by adjusting it so as to maintain this potential in a narrow operating range. This control can be manual or automatic.

Abstract translation: 根据本发明的一个实施例，离子束装置采用具有热丝阴极中和器的无栅离子源的形式，其中热丝被来自阴极 - 中和器加热器的电流加热。 阴极中和器连接到无电离离子源的放电源的负极端子。 该连接基本上与地面隔离（周围真空室的电位，通常在地面），其电位相对于地面测量。 通过对阴极中和器的加热器电流进行调节，以将其保持在窄的工作范围内。 此控件可以手动或自动。

公开(公告)号：US06351087B1

公开(公告)日：2002-02-26

申请号：US09347755

申请日：1999-07-06

Applicant: Koichi Katase ,  Tsuyoshi Ichibakase ,  Katsushi Seki

Inventor： Koichi Katase ,  Tsuyoshi Ichibakase ,  Katsushi Seki

IPC: H01J2300

CPC classification number: H01J23/005 ,  H01J23/54 ,  H01J65/044

Abstract: A long life microwave electrodeless discharge lamp apparatus capable of preventing the generation of noise. The microwave electrodeless discharge lamp apparatus includes a magnetron having a magnetron tube and a yoke that surrounds the magnetron tube, a container housing at least the magnetron tube, a waveguide in which microwaves oscillated by the magnetron are propagated, an electrodeless discharge tube sealing luminescent materials excited by the microwaves to emit light, wherein a space surrounded by the yoke is communicated with the inside of the container, and wherein a fluid is sealed in the container. Thus, the magnetron tube is in a state in which it is immersed in the fluid.

Abstract translation: 一种能够防止产生噪音的长寿命微波无极放电灯装置。 微波无电极放电灯装置包括具有磁控管和磁轭的磁控管，该磁控管包围磁控管，至少容纳磁控管的容器，由磁控管振荡的微波传播的波导，密封发光材料的无电极放电管 由微波激发以发光，其中由轭围绕的空间与容器的内部连通，并且其中流体被密封在容器中。 因此，磁控管处于浸入流体的状态。