发明授权
- 专利标题: Solder ball attaching process
- 专利标题(中): 焊球附着工艺
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申请号: US10248225申请日: 2002-12-30
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公开(公告)号: US06732912B2公开(公告)日: 2004-05-11
- 发明人: Ho-Ming Tong , Chun-Chi Lee , Jen-Kuang Fang , Min-Lung Huang , Jau-Shoung Chen , Ching-Huei Su , Chao-Fu Weng , Yung-Chi Lee , Yu-Chen Chou , Tsung-Hua Wu , Su Tao
- 申请人: Ho-Ming Tong , Chun-Chi Lee , Jen-Kuang Fang , Min-Lung Huang , Jau-Shoung Chen , Ching-Huei Su , Chao-Fu Weng , Yung-Chi Lee , Yu-Chen Chou , Tsung-Hua Wu , Su Tao
- 优先权: TW91103734A 20020301
- 主分类号: B23K3102
- IPC分类号: B23K3102
摘要:
A solder ball attaching process for attaching solder balls to a wafer is provided. First, an under-ball-metallurgy layer is formed on the active surface of the wafer. Patterned masking layers are sequentially formed over the active surface of the wafer. The masking layers together form a step opening structure that exposes the under-ball-metallic layer. A solder ball is placed on the uppermost masking layer and allowed to roll so that the solder ball drops into the step opening structure by gravity. A reflow process is conducted to join the solder ball and the under-ball-metallurgy layer together. Finally, various masking layers are removed to expose the solder ball on the bonding pad of the wafer.
公开/授权文献
- US20030164395A1 SOLDER BALL ATTACHING PROCESS 公开/授权日:2003-09-04
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