发明授权
US06734061B2 Semiconductor memory device having a plug contacted to a capacitor electrode and method for fabricating the capacitor 失效
具有与电容器电极接触的插头的半导体存储器件及其制造方法

  • 专利标题: Semiconductor memory device having a plug contacted to a capacitor electrode and method for fabricating the capacitor
  • 专利标题(中): 具有与电容器电极接触的插头的半导体存储器件及其制造方法
  • 申请号: US09888060
    申请日: 2001-06-25
  • 公开(公告)号: US06734061B2
    公开(公告)日: 2004-05-11
  • 发明人: Kwon HongHyung-Bok Choi
  • 申请人: Kwon HongHyung-Bok Choi
  • 优先权: KR2000-37007 20000630
  • 主分类号: H01L218242
  • IPC分类号: H01L218242
Semiconductor memory device having a plug contacted to a capacitor electrode and method for fabricating the capacitor
摘要:
The present invention provides a semiconductor memory device and a fabrication method capable of preventing the contact between a dielectric layer of a capacitor and a diffusion barrier. The plug comprises a diffusion barrier layer and a seed layer for forming a lower electrode of a capacitor. Accordingly, it is possible to prevent the dielectric layer being contacted with the diffusion barrier, whereby the leakage current may be reduced, and the capacitance of the capacitor may be increased.
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