发明授权
- 专利标题: Semiconductor memory device having a plug contacted to a capacitor electrode and method for fabricating the capacitor
- 专利标题(中): 具有与电容器电极接触的插头的半导体存储器件及其制造方法
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申请号: US09888060申请日: 2001-06-25
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公开(公告)号: US06734061B2公开(公告)日: 2004-05-11
- 发明人: Kwon Hong , Hyung-Bok Choi
- 申请人: Kwon Hong , Hyung-Bok Choi
- 优先权: KR2000-37007 20000630
- 主分类号: H01L218242
- IPC分类号: H01L218242
摘要:
The present invention provides a semiconductor memory device and a fabrication method capable of preventing the contact between a dielectric layer of a capacitor and a diffusion barrier. The plug comprises a diffusion barrier layer and a seed layer for forming a lower electrode of a capacitor. Accordingly, it is possible to prevent the dielectric layer being contacted with the diffusion barrier, whereby the leakage current may be reduced, and the capacitance of the capacitor may be increased.
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