Invention Grant
US06734686B2 Method for detecting quantity variation of high purity liquid chemicals and devices to carry out the method
有权
用于检测高纯度液体化学品和装置的数量变化的方法来执行该方法
- Patent Title: Method for detecting quantity variation of high purity liquid chemicals and devices to carry out the method
- Patent Title (中): 用于检测高纯度液体化学品和装置的数量变化的方法来执行该方法
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Application No.: US10118778Application Date: 2002-04-08
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Publication No.: US06734686B2Publication Date: 2004-05-11
- Inventor: Chi-Hui Lin , Cheng-Jye Chu , Pai-Mou Lee , Goang-Cheng Chang
- Applicant: Chi-Hui Lin , Cheng-Jye Chu , Pai-Mou Lee , Goang-Cheng Chang
- Main IPC: G01R2726
- IPC: G01R2726

Abstract:
This invention relates to a method for detecting quantity variation of high purity liquid chemicals by way of detecting capacitance variation to determine the liquid level of liquid chemicals. Meanwhile, the ratio of the area of the smallest electrode of the capacitor to the distance between the electrodes is adjusted to magnify the capacitance so that a very small variation can be observed clearly. This invention also discloses a device to carry out this method.
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