发明授权
- 专利标题： Crystal growing apparatus
- 专利标题（中）： 水晶生长装置
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申请号： US10105634申请日： 2002-03-26
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公开(公告)号： US06740160B2公开(公告)日： 2004-05-25
- 发明人: Takayuki Kubo , Hiroshi Asano , Fumio Kawahigashi , Akira Tsujino
- 申请人： Takayuki Kubo , Hiroshi Asano , Fumio Kawahigashi , Akira Tsujino
- 主分类号： C30B3500
- IPC分类号： C30B3500
摘要：
In a high rate pulling with a cooler 10 surrounding a single crystal 8, steam explosion by leakage from the cooler 10 is prevented. Flow rates La, Lb of cooling water are measured by flowmeters 14a, 14b on a cooling water inflow side and cooling water outflow side of the cooler 10. When flow rate difference &Dgr;L (La−Lb) determined from the flow rates La, Lb exceeds 20 cc/minute, open/close valves 15a, 15b, 15c are operated to stop water supply to the cooler 10 and drain outward the cooing water in the cooler 10.
公开/授权文献
- US20030183163A1 Crystal growing apparatus 公开/授权日：2003-10-02