公开(公告)号：US06740160B2

公开(公告)日：2004-05-25

申请号：US10105634

申请日：2002-03-26

申请人： Takayuki Kubo ,  Hiroshi Asano ,  Fumio Kawahigashi ,  Akira Tsujino

发明人： Takayuki Kubo ,  Hiroshi Asano ,  Fumio Kawahigashi ,  Akira Tsujino

IPC分类号： C30B3500

CPC分类号： C30B15/14 ,  Y10T117/10 ,  Y10T117/1032 ,  Y10T117/1052 ,  Y10T117/1068 ,  Y10T117/1072 ,  Y10T117/1088

摘要： In a high rate pulling with a cooler 10 surrounding a single crystal 8, steam explosion by leakage from the cooler 10 is prevented. Flow rates La, Lb of cooling water are measured by flowmeters 14a, 14b on a cooling water inflow side and cooling water outflow side of the cooler 10. When flow rate difference &Dgr;L (La−Lb) determined from the flow rates La, Lb exceeds 20 cc/minute, open/close valves 15a, 15b, 15c are operated to stop water supply to the cooler 10 and drain outward the cooing water in the cooler 10.

摘要翻译： 在围绕单晶8的冷却器10的高速率牵引中，防止从冷却器10泄漏的蒸汽爆炸。 通过冷却水流入侧的流量计14a，14b和冷却器10的冷却水流出侧测量冷却水的流量La，Lb。当根据流量La，Lb求出的流量差ΔL（La-Lb）超过 操作20cc /分钟，打开/关闭阀门15a，15b，15c停止向冷却器10供水并向外排出冷却器10中的冷却水。