发明授权
- 专利标题: Method of making a wafer level chip scale package
- 专利标题(中): 制造晶圆级芯片级封装的方法
-
申请号: US10045783申请日: 2002-01-12
-
公开(公告)号: US06743660B2公开(公告)日: 2004-06-01
- 发明人: Hsin-Hui Lee , Chia-Fu Lin , Chao-Yuan Su , Yen-Ming Chen , Kai-Ming Ching , Li-Chih Chen
- 申请人: Hsin-Hui Lee , Chia-Fu Lin , Chao-Yuan Su , Yen-Ming Chen , Kai-Ming Ching , Li-Chih Chen
- 主分类号: H01L2148
- IPC分类号: H01L2148
摘要:
A method of forming a bump on a substrate such as a semiconductor wafer or flip chip. The method includes the act of providing a semiconductor device having a contact pad and having an upper passivation layer and an opening formed in the upper passivation layer exposing a portion of the contact pad. An under bump metallurgy is deposited over the upper passivation layer and the contact pad. An electrically conductive redistribution trace is deposited over the under bump metallurgy. A photoresist layer is deposited, patterned and developed to provide portions selectively protecting the electrically conductive redistribution trace and the under bump metallurgy. Excess portions of the electrically conductive redistribution trace and under bump metallurgy not protected by the photoresist are removed.
公开/授权文献
- US20030134496A1 Method of making a wafer level chip scale package 公开/授权日:2003-07-17
信息查询