Invention Grant
US06744096B2 Non-volatile memory device having a bit line contact pad and method for manufacturing the same 有权
具有位线接触焊盘的非易失性存储器件及其制造方法

  • Patent Title: Non-volatile memory device having a bit line contact pad and method for manufacturing the same
  • Patent Title (中): 具有位线接触焊盘的非易失性存储器件及其制造方法
  • Application No.: US10453943
    Application Date: 2003-06-04
  • Publication No.: US06744096B2
    Publication Date: 2004-06-01
  • Inventor: Seung-Min LeeByung-Hong Chung
  • Applicant: Seung-Min LeeByung-Hong Chung
  • Priority: KR2001-8114 20010219
  • Main IPC: H01L29788
  • IPC: H01L29788
Non-volatile memory device having a bit line contact pad and method for manufacturing the same
Abstract:
A non-volatile memory device and a method for manufacturing the same are disclosed. A non-volatile memory device comprises a semiconductor substrate having active areas which extend in a first direction and are repeatedly arranged in a second direction orthogonal to the first direction, a plurality of word lines formed on the semiconductor substrate which extending in the second direction while being repeatedly arranged in the first direction, string select lines adjacent to a first word line and extending in the second direction, ground select lines adjacent to a last word line and extending in the second direction, a first insulating interlayer formed on the resultant structure and comprising a first opening exposing the active area between the ground select lines and a second opening exposing the active area between the string select lines, a bit line contact pad formed in the second opening. A sidewall of the contact pad comprises a negative slope in the first direction and a positive slope in the second direction. A hard mask layer pattern, having the same pattern size as the active area, is formed on the contact pad and the first insulating interlayer. A second insulating interlayer is formed on the hard mask layer pattern and the first insulating interlayer. The second insulating interlayer has a bit line contact hole on the contact pad and thus the process margin is sufficiently achieved.
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