发明授权
US06762063B2 Method of fabricating non-volatile ferroelectric transistors 有权
制造非易失性铁电晶体管的方法

Method of fabricating non-volatile ferroelectric transistors
摘要:
A method of fabricating a non-volatile ferroelectric memory transistor includes forming a bottom electrode; depositing a ferroelectric layer over an active region beyond the margins of the bottom electrode; depositing a top electrode on the ferroelectric layer; and metallizing the structure to form a source electrode, a gate electrode and a drain electrode. A non-volatile ferroelectric memory transistor includes a bottom electrode formed above a gate region, wherein the bottom electrode has a predetermined area within a peripheral boundary; a ferroelectric layer extending over and beyond the bottom electrode peripheral boundary; and a top electrode formed on said ferroelectric layer.
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