发明授权
- 专利标题: Method of fabricating non-volatile ferroelectric transistors
- 专利标题(中): 制造非易失性铁电晶体管的方法
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申请号: US10395368申请日: 2003-03-24
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公开(公告)号: US06762063B2公开(公告)日: 2004-07-13
- 发明人: Sheng Teng Hsu , Fengyan Zhang , Tingkai Li
- 申请人: Sheng Teng Hsu , Fengyan Zhang , Tingkai Li
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
A method of fabricating a non-volatile ferroelectric memory transistor includes forming a bottom electrode; depositing a ferroelectric layer over an active region beyond the margins of the bottom electrode; depositing a top electrode on the ferroelectric layer; and metallizing the structure to form a source electrode, a gate electrode and a drain electrode. A non-volatile ferroelectric memory transistor includes a bottom electrode formed above a gate region, wherein the bottom electrode has a predetermined area within a peripheral boundary; a ferroelectric layer extending over and beyond the bottom electrode peripheral boundary; and a top electrode formed on said ferroelectric layer.
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