发明授权
- 专利标题: Method for diagnosing life of manufacturing equipment using rotary machine
- 专利标题(中): 使用旋转机器诊断制造设备寿命的方法
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申请号: US10228111申请日: 2002-08-27
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公开(公告)号: US06766275B2公开(公告)日: 2004-07-20
- 发明人: Shuichi Samata , Yukihiro Ushiku , Ken Ishii , Takashi Nakao
- 申请人: Shuichi Samata , Yukihiro Ushiku , Ken Ishii , Takashi Nakao
- 优先权: JPP2001-263548 20010831
- 主分类号: G06F1900
- IPC分类号: G06F1900
摘要:
A method for diagnosing life of manufacturing equipment having a rotary machine, includes: measuring reference time series data for characteristics before deterioration of the manufacturing equipment occurs; finding a reference auto covariance function based on the reference time series data; extracting a reference variation caused by variations of the process condition and power supply from the reference auto covariance function, and calculating a cycle of the reference variation; measuring diagnostic time series data for the characteristics in a sequence to be measured of the manufacturing equipment; finding a diagnostic auto covariance function based on the diagnostic time series data; and determining the life of the manufacturing equipment from the diagnostic auto covariance function using a component with a cycle shorter than a cycle of the reference variation.