公开(公告)号：US06885972B2

公开(公告)日：2005-04-26

申请号：US10229005

申请日：2002-08-28

申请人： Shuichi Samata ,  Yukihiro Ushiku ,  Takeo Furuhata ,  Takashi Nakao ,  Ken Ishii

发明人： Shuichi Samata ,  Yukihiro Ushiku ,  Takeo Furuhata ,  Takashi Nakao ,  Ken Ishii

IPC分类号： F04B51/00 ,  G05B19/4065 ,  H01L21/02 ,  G06F19/00

CPC分类号： G05B19/4065 ,  G05B2219/37252 ,  Y02P90/86

摘要： A method for predicting life span of a rotary machine used in a manufacturing apparatus, includes: measuring rotary machine acceleration evaluation time series data with a sampling interval being less than a half the cycle of an analysis target frequency, a number of samplings being at least four times the analysis target frequency; generating evaluation diagnosis data based on variations in characteristics corresponding to the analysis target frequency by subjecting the evaluation time series data to frequency analysis; and determining the life span of the rotary machine using the evaluation diagnosis data.

摘要翻译： 一种用于预测制造装置中使用的旋转机械的使用寿命的方法，包括：以取样间隔小于分析对象频率的周期的一半来测量旋转机械加速度评价时间序列数据，取样次数至少为 四倍分析目标频率; 通过对评价时间序列数据进行频率分析，生成基于与分析对象频率对应的特性的变化的评价诊断数据; 以及使用评估诊断数据确定所述旋转机器的使用寿命。

公开(公告)号：US06937963B2

公开(公告)日：2005-08-30

申请号：US10228110

申请日：2002-08-27

申请人： Ken Ishii ,  Takashi Nakao ,  Yukihiro Ushiku ,  Shuichi Samata

发明人： Ken Ishii ,  Takashi Nakao ,  Yukihiro Ushiku ,  Shuichi Samata

IPC分类号： F04B49/10 ,  C23C16/52 ,  F04B51/00 ,  G05B9/02 ,  G05B23/02 ,  H01L21/02 ,  H01L21/31 ,  G06F11/30 ,  G06F15/00 ,  G21C17/00

CPC分类号： G05B9/02 ,  G05B23/024 ,  G05B23/0291

摘要： A method for avoiding irregular shutoff of production equipment, includes: measuring regularly time-series data of characteristics of a rotary machine used in the production equipment running for the production; obtaining first failure diagnosis data subjecting the time-series data to a first real-time analysis; obtaining second failure diagnosis data subjecting the first failure diagnosis data to a second real-time analysis; predicting a status of the production equipment several minutes later using the second failure diagnosis data; and shutting off during a production process if the result of the prediction determines that the production equipment will shut off irregularly, and switching to a purge sequence for conducting a gas purge of the production equipment.

摘要翻译： 一种避免生产设备不规则关闭的方法，包括：定期测量生产设备运行中使用的旋转机械特性的时间序列数据; 获得对时间序列数据进行第一次实时分析的第一故障诊断数据; 获得第一故障诊断数据进行第二实时分析的第二故障诊断数据; 几分钟后使用第二次故障诊断数据预测生产设备的状态; 如果预测结果确定生产设备将不规则地关闭，并切换到用于进行生产设备的气体吹扫的吹扫序列，则在生产过程中关闭。

公开(公告)号：US06909993B2

公开(公告)日：2005-06-21

申请号：US10228960

申请日：2002-08-28

申请人： Takashi Nakao ,  Yukihiro Ushiku ,  Shuichi Samata ,  Hiroshi Akahori ,  Ken Ishii

发明人： Takashi Nakao ,  Yukihiro Ushiku ,  Shuichi Samata ,  Hiroshi Akahori ,  Ken Ishii

IPC分类号： G05B19/418 ,  G05B23/02 ,  G06F11/30 ,  G06F17/00 ,  G21C17/00 ,  H01L21/00 ,  H01L21/02 ,  H01L21/31

CPC分类号： G05B23/024 ,  Y02P90/86

摘要： A method for diagnosing failure of a manufacturing apparatus, includes: measuring time series data of characteristics of a reference apparatus which conducts same processes as the manufacturing apparatus, and recording the time series data of the characteristics in a system information storage unit as a system information database; reading out a recipe listed in a process control information database recorded in a process control information storage unit; driving and controlling the manufacturing apparatus, measuring time series data of the characteristics as test data, and outputting the test data in real time, in accordance with the recipe; performing calculations on the test data, and creating failure diagnosis data; and diagnosing the failure of the manufacturing apparatus using the failure diagnosis data and the system information database.

摘要翻译： 一种用于诊断制造装置的故障的方法，包括：测量与制造装置进行相同处理的参考装置的特性的时间序列数据，并将该特性的时间序列数据记录在系统信息存储单元中作为系统信息 数据库; 读出记录在过程控制信息存储单元中的过程控制信息数据库中列出的配方; 驱动和控制制造装置，测量特性的时间序列数据作为测试数据，并根据配方实时输出测试数据; 对测试数据执行计算，并创建故障诊断数据; 以及使用故障诊断数据和系统信息数据库诊断制造装置的故障。

公开(公告)号：US06766275B2

公开(公告)日：2004-07-20

申请号：US10228111

申请日：2002-08-27

申请人： Shuichi Samata ,  Yukihiro Ushiku ,  Ken Ishii ,  Takashi Nakao

发明人： Shuichi Samata ,  Yukihiro Ushiku ,  Ken Ishii ,  Takashi Nakao

IPC分类号： G06F1900

CPC分类号： G05B23/0283

摘要： A method for diagnosing life of manufacturing equipment having a rotary machine, includes: measuring reference time series data for characteristics before deterioration of the manufacturing equipment occurs; finding a reference auto covariance function based on the reference time series data; extracting a reference variation caused by variations of the process condition and power supply from the reference auto covariance function, and calculating a cycle of the reference variation; measuring diagnostic time series data for the characteristics in a sequence to be measured of the manufacturing equipment; finding a diagnostic auto covariance function based on the diagnostic time series data; and determining the life of the manufacturing equipment from the diagnostic auto covariance function using a component with a cycle shorter than a cycle of the reference variation.

摘要翻译： 一种用于诊断具有旋转机器的制造设备的寿命的方法，包括：测量制造设备劣化之前的特性的基准时间序列数据; 基于参考时间序列数据找到参考自动协方差函数; 从参考自动协方差函数中提取由过程条件和电源的变化引起的参考变化，并计算参考变化的周期; 测量制造设备要测量的序列中的特性的诊断时间序列数据; 基于诊断时间序列数据找到诊断自动协方差函数; 以及使用周期短于参考变化的周期的分量从诊断自动协方差函数确定制造设备的寿命。

公开(公告)号：US06898551B2

公开(公告)日：2005-05-24

申请号：US10418275

申请日：2003-04-18

申请人： Shuichi Samata ,  Yukihiro Ushiku ,  Akihito Yamamoto ,  Takashi Nakao ,  Takeo Furuhata

发明人： Shuichi Samata ,  Yukihiro Ushiku ,  Akihito Yamamoto ,  Takashi Nakao ,  Takeo Furuhata

IPC分类号： F04B51/00 ,  F04B49/10 ,  G01H1/00 ,  G05B23/02 ,  G21C17/00 ,  G06F19/00

CPC分类号： G05B23/0229 ,  G01H1/003 ,  G05B23/0283

摘要： A system for predicting life of a rotary machine, includes a vibration gauge configured to measure time series data of a peak acceleration of the rotary machine; a band pass filter configured to filter an analog signal of the time series data of the peak acceleration measured by the vibration gauge in a frequency band including a first analysis frequency expressed as a product of an equation including a number of rotor blades of the rotary machine and a normal frequency unique to the rotary machine; and a data processing unit configured to predict a life span of the rotary machine by characteristics of the filtered analog data of the time series data of the peak acceleration with the first analysis frequency.

摘要翻译： 一种用于预测旋转机器寿命的系统，包括配置成测量旋转机器的峰值加速度的时间序列数据的振动计; 带通滤波器，被配置为滤波由振动计测量的峰值加速度的时间序列数据的模拟信号，所述频率带包括第一分析频率的频带，所述第一分析频率表示为包括旋转机器的多个转子叶片的等式的乘积 和旋转机器唯一的正常频率; 以及数据处理单元，其被配置为通过具有第一分析频率的峰值加速度的时间序列数据的经滤波的模拟数据的特性来预测旋转机器的寿命。

公开(公告)号：US06944572B2

公开(公告)日：2005-09-13

申请号：US10752816

申请日：2004-01-08

申请人： Yukihiro Ushiku ,  Tsunetoshi Arikado ,  Shuichi Samata ,  Takashi Nakao ,  Yuuichi Mikata

发明人： Yukihiro Ushiku ,  Tsunetoshi Arikado ,  Shuichi Samata ,  Takashi Nakao ,  Yuuichi Mikata

IPC分类号： F04D27/00 ,  F04B37/16 ,  F04B49/06 ,  F04B49/10 ,  F04B51/00 ,  G01M13/00 ,  H01L21/00 ,  G06F101/21

CPC分类号： F04B51/00 ,  F04B49/065 ,  F04D19/04 ,  F04D27/001 ,  G01M13/00

摘要： An apparatus for predicting life expectancy of a rotary machine includes: a load recipe input module acquiring loading conditions of a rotary machine; a characterizing feature input module obtaining characterizing feature data of a rotary machine; and a life expectancy prediction module calculating life expectancy of the rotary machine in conformity with the loading conditions and the characterizing feature data.

摘要翻译： 一种用于预测旋转机器的预期寿命的装置包括：负载配方输入模块，其获取旋转机器的负载条件; 特征特征输入模块获得旋转机器的特征特征数据; 以及根据负载条件和特征特征数据计算旋转机器的预期寿命的预期寿命预测模块。

公开(公告)号：US07065469B2

公开(公告)日：2006-06-20

申请号：US10390698

申请日：2003-03-19

申请人： Shuichi Samata ,  Takeo Furuhata ,  Yukihiro Ushiku ,  Akihito Yamamoto ,  Takashi Nakao

发明人： Shuichi Samata ,  Takeo Furuhata ,  Yukihiro Ushiku ,  Akihito Yamamoto ,  Takashi Nakao

IPC分类号： G01M7/02

CPC分类号： G01M15/12 ,  G05B23/0221 ,  G05B23/0283

摘要： A manufacturing apparatus which includes a rotary machine, includes: a plurality of accelerometers configured to measure diagnosis time series data attached to the rotary machine at locations where variations of the rotary machine are different; a frequency analysis device configured to perform a frequency analysis on the diagnosis time series data measured by the plurality of accelerometers; a time series data recording module configured to generate diagnosis data based on variations in characteristics of vibration corresponding to an analysis target frequency and to record the diagnosis data; and a life prediction unit configured to analyze the diagnosis data to determine a life span of the rotary machine.

摘要翻译： 一种包括旋转机器的制造装置，包括：多个加速度计，被配置为在旋转机器的变化不同的位置处测量附接到旋转机器的诊断时间序列数据; 频率分析装置，被配置为对由所述多个加速度计测量的诊断时间序列数据执行频率分析; 时间序列数据记录模块，被配置为基于与分析目标频率相对应的振动特性的变化产生诊断数据并记录诊断数据; 以及寿命预测单元，其构造成分析所述诊断数据以确定所述旋转机器的寿命。

公开(公告)号：US20050107984A1

公开(公告)日：2005-05-19

申请号：US11020477

申请日：2004-12-27

申请人： Shuichi Samata ,  Yukihiro Ushiku ,  Takashi Nakao ,  Takeo Furuhata

发明人： Shuichi Samata ,  Yukihiro Ushiku ,  Takashi Nakao ,  Takeo Furuhata

IPC分类号： B25B13/56 ,  B25F1/04 ,  F04C18/18 ,  F04C29/00 ,  G06F11/30

CPC分类号： F04C18/18 ,  B25B13/56 ,  B25F1/04 ,  F04C28/28 ,  F04C29/0085 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2270/07 ,  F04C2270/80

摘要： A method for predicting life of a rotary machine used in a manufacturing apparatus, includes: determining a starting time of an abnormal condition just before a failure of a monitor rotary machine used in a monitor manufacturing process, from monitor time-series data for characteristics of the monitor rotary machine, statistically analyzing the monitor time-series data, and finding a value for the characteristics at the starting time of the abnormal condition as a threshold of the abnormal condition; measuring diagnosis time-series data for the characteristic of a motor current of a diagnosis rotary machine during a manufacturing process; preparing diagnosis data from the diagnosis time-series data; and determining a time for the diagnosis data exceeding the threshold as the life of the diagnosis rotary machine.

摘要翻译： 一种用于预测制造设备中使用的旋转机器的寿命的方法，包括：根据监视器制造过程中使用的监视旋转机器故障之前的异常状况的开始时间，从监视时间序列数据 监视旋转机，对监视时间序列数据进行统计分析，并将异常状态开始时的特性值作为异常状态的阈值求和; 在制造过程中测量诊断旋转机器的电机电流特性的诊断时间序列数据; 从诊断时间序列数据准备诊断数据; 并且将诊断数据超过阈值的时间确定为诊断旋转机器的寿命。

公开(公告)号：US06865513B2

公开(公告)日：2005-03-08

申请号：US10101720

申请日：2002-03-21

申请人： Yukihiro Ushiku ,  Tsunetoshi Arikado ,  Shuichi Samata ,  Takashi Nakao ,  Yuuichi Mikata

发明人： Yukihiro Ushiku ,  Tsunetoshi Arikado ,  Shuichi Samata ,  Takashi Nakao ,  Yuuichi Mikata

IPC分类号： F04D27/00 ,  F04B37/16 ,  F04B49/06 ,  F04B49/10 ,  F04B51/00 ,  G01M13/00 ,  H01L21/00 ,  G06F11/30

CPC分类号： F04B51/00 ,  F04B49/065 ,  F04D19/04 ,  F04D27/001 ,  G01M13/00

摘要： An apparatus for predicting life expectancy of a rotary machine includes: a load recipe input module acquiring loading conditions of a rotary machine; a characterizing feature input module obtaining characterizing feature data of a rotary machine; and a life expectancy prediction module calculating life expectancy of the rotary machine in conformity with the loading conditions and the characterizing feature datap.

摘要翻译： 一种用于预测旋转机器的预期寿命的装置包括：负载配方输入模块，其获取旋转机器的负载条件; 特征特征输入模块获得旋转机器的特征特征数据; 以及根据加载条件和特征特征数据表计算旋转机器的预期寿命的预期寿命预测模块。

公开(公告)号：US20050284575A1

公开(公告)日：2005-12-29

申请号：US11196398

申请日：2005-08-04

申请人： Kazuhide Hasebe ,  Atsushi Endo ,  Mitsuhiro Okada ,  Jun Ogawa ,  Akihito Yamamoto ,  Takashi Nakao ,  Masaki Kamimura ,  Yukihiro Ushiku

发明人： Kazuhide Hasebe ,  Atsushi Endo ,  Mitsuhiro Okada ,  Jun Ogawa ,  Akihito Yamamoto ,  Takashi Nakao ,  Masaki Kamimura ,  Yukihiro Ushiku

IPC分类号： C23C16/44 ,  H01L21/00 ,  C23F1/00 ,  B44C1/22

CPC分类号： H01L21/67248 ,  C23C16/4405 ,  H01L21/67109

摘要： A processing system of the present invention includes: a reaction container in which a substrate to be processed is placed, a process-gas supplying mechanism that supplies a process gas into the reaction container at a process to the substrate, a cleaning-gas supplying mechanism that supplies a corrosive cleaning gas into the reaction container at a cleaning process, a gas-discharging-way member connected to the reaction chamber, a heating unit that heats a specific portion of the reaction container and the gas-discharging-way member, a temperature detecting unit that detects a temperature of the specific portion, a temperature controlling unit that controls the heating unit based on a detection value detected by the temperature detecting unit in such a manner that the specific portion becomes to a predetermined target temperature, and a temperature changing unit that changes the target temperature between at the process to the substrate and at the cleaning process. By means of the temperature changing unit, the target temperature is set to a temperature at which adhesion of reaction by-products to the specific portion may be inhibited, at the process to the substrate, while the target temperature is set to a temperature at which corrosion of the specific portion may be inhibited, at the cleaning process.

摘要翻译： 本发明的处理系统包括：反应容器，其中放置有待处理的基板，处理气体供给机构，其将处理气体在处理过程中提供给反应容器;清洗气体供给机构 在清洁过程中向反应容器提供腐蚀性清洁气体，连接到反应室的气体排出构件，加热反应容器的特定部分的加热单元和气体排出通路构件， 温度检测单元，其检测特定部分的温度;温度控制单元，其基于由温度检测单元检测的检测值以特定部分变为预定目标温度的方式控制加热单元;温度控制单元， 改变单元，其在过程到基板和清洁过程之间改变目标温度。 通过温度变化单元，将目标温度设定为在基板处理时可以抑制反应副产物对特定部分的粘附的温度，同时将目标温度设定为温度 在清洗过程中可能会抑制特定部分的腐蚀。