Invention Grant
- Patent Title: Electron microscope, method for operating the same, and computer-readable medium
- Patent Title (中): 电子显微镜，其操作方法和计算机可读介质
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Application No.: US10410133Application Date: 2003-04-10
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Publication No.: US06768114B2Publication Date: 2004-07-27
- Inventor: Shigenori Takagi
- Applicant: Shigenori Takagi
- Priority: JPP2002-108931 20020411
- Main IPC: H01J3728
- IPC: H01J3728
Abstract:
In an electron microscope, at least the characteristics of the specimen is set on a first image observation mode screen as an image observation condition. An observation image of the specimen is displayed on a first display section based on a condition set on the first image observation mode screen. Observation images of the specimen are displayed on a second display section as one or more secondary electron images or one or more reflection electron images under at least two types of image observation conditions based on the condition set on the first image observation mode screen. Any desired observation image is selected from among the observation images displayed on the second display section.
Public/Granted literature
- US20030193026A1 Electron microscope, method for operating the same, and computer-readable medium Public/Granted day:2003-10-16
Information query
