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US06775583B2 Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore 有权
因此，用于薄膜和基板的光学检查和测量中的用户指导的方法和装置

  • Patent Title: Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore
  • Patent Title (中): 因此，用于薄膜和基板的光学检查和测量中的用户指导的方法和装置
  • Application No.: US09900457
    Application Date: 2001-07-09
  • Publication No.: US06775583B2
    Publication Date: 2004-08-10
  • Inventor: Matthias Slodowski , Karl-Heinz Irmer
  • Applicant: Matthias Slodowski , Karl-Heinz Irmer
  • Main IPC: G06F1900
  • IPC: G06F1900
Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore
Abstract:
A method, apparatus, and software for guiding users during optical inspection and measurement of coated and noncoated substrates with an optical measurement system is provided. The optical measurement system incorporates an integrated recipe and data browser with sortable features to facilitate the optical inspection and measurement by the user.
Abstract(Chinese):

提供了一种用于在使用光学测量系统的光学检查和测量涂覆和非涂覆的基板期间引导用户的方法，装置和软件。 光学测量系统结合了综合配方和数据浏览器，具有可排序的特征，便于用户进行光学检测和测量。

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