发明授权
- 专利标题: Method of adhesion between an oxide layer and a metal layer
- 专利标题(中): 氧化物层和金属层之间的粘附方法
-
申请号: US10154224申请日: 2002-05-21
-
公开(公告)号: US06790476B1公开(公告)日: 2004-09-14
- 发明人: Dwight R. Jennison , Alexander Bogicevic , Jeffry A. Kelber , Scott A. Chambers
- 申请人: Dwight R. Jennison , Alexander Bogicevic , Jeffry A. Kelber , Scott A. Chambers
- 主分类号: C23C1606
- IPC分类号: C23C1606
摘要:
A method of controlling the wetting characteristics and increasing the adhesion between a metal and an oxide layer. By introducing a negatively-charged species to the surface of an oxide layer, layer-by-layer growth of metal deposited onto the oxide surface is promoted, increasing the adhesion strength of the metal-oxide interface. The negatively-charged species can either be deposited onto the oxide surface or a compound can be deposited that dissociates on, or reacts with, the surface to form the negatively-charged species. The deposited metal adatoms can thereby bond laterally to the negatively-charged species as well as vertically to the oxide surface as well as react with the negatively charged species, be oxidized, and incorporated on or into the surface of the oxide.