发明授权
- 专利标题: Wire bonding method for copper interconnects in semiconductor devices
- 专利标题(中): 半导体器件中铜互连的引线接合方法
-
申请号: US09467253申请日: 1999-12-20
-
公开(公告)号: US06790757B1公开(公告)日: 2004-09-14
- 发明人: Sailesh Chittipeddi , Sailesh Mansinh Merchant
- 申请人: Sailesh Chittipeddi , Sailesh Mansinh Merchant
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
The present invention uses wire bonding technology to bond interconnect materials that oxidize easily by using a wire with stable oxidation qualities. A passivation layer is formed on the semiconductor substrate to encapsulate the bonding pad made from the interconnect material such that the wire bonds with the passivation layer itself, not with the interconnect material. The passivation layer is selected to be a material that is metallurgically stable when bonded to the interconnect material. Since the wire is stable compared with the interconnect material, i.e., it does not readily corrode, a reliable mechanical and electrical connection is provided between the semiconductor device (interconnect material) and the wire, with the passivation layer disposed therebetween.
信息查询