Invention Grant
- Patent Title: Method of manufacturing nano transistors
- Patent Title (中): 制造纳米晶体管的方法
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Application No.: US10185104Application Date: 2002-06-27
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Publication No.: US06797629B2Publication Date: 2004-09-28
- Inventor: Moon Gyu Jang , Won Ju Cho , Seong Jae Lee , Kyoung Wan Park
- Applicant: Moon Gyu Jang , Won Ju Cho , Seong Jae Lee , Kyoung Wan Park
- Priority: KR10-2002-2497 20020116
- Main IPC: H01L21302
- IPC: H01L21302

Abstract:
The present invention relates to a method of manufacturing a nano transistor. The present invention manufactures the nano transistor without changing a conventional method of forming the nano transistor formed on a SOI substrate. Further, the present invention includes forming a N well and a P well at giving regions of an underlying silicon substrate so that a given voltage can be individually applied to a NMOS transistor and a PMOS transistor. Therefore, the present invention can control the threshold voltage to prevent an increase of the leakage current.
Public/Granted literature
- US20030134514A1 Method of manufacturing nano transistors Public/Granted day:2003-07-17
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