发明授权
- 专利标题: Optical switch with low-inertia micromirror
- 专利标题(中): 具有低惯量微镜的光开关
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申请号: US09765520申请日: 2001-01-17
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公开(公告)号: US06801681B2公开(公告)日: 2004-10-05
- 发明人: Patrick E. Feierabend , John S. Foster , Bryant P. Hichwa , Richard T. Martin , Paul J. Rubel , Kimon Rybnicek , John W. Stocker , Jeffery F. Summers
- 申请人: Patrick E. Feierabend , John S. Foster , Bryant P. Hichwa , Richard T. Martin , Paul J. Rubel , Kimon Rybnicek , John W. Stocker , Jeffery F. Summers
- 主分类号: G02B626
- IPC分类号: G02B626
摘要:
An optical switch is fabricated using micro-electro-mechanical system (“MEMS”) techniques. A thin mirror is fabricated in the major plane of the substrate and rotates about an axis perpendicular to the major plane to move into and out of an optical beam path. The mirror surface is open for chemical polishing and deposition, resulting in a high-quality mirror. In one embodiment, the backside of the mirror is patterned with reinforcing ribs. In another embodiment, a two-sided mirror is fabricated.
公开/授权文献
- US20020094152A1 Optical switch with low-inertia micromirror 公开/授权日:2002-07-18
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