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公开(公告)号：US06801681B2
公开(公告)日：2004-10-05
申请号：US09765520
申请日：2001-01-17
申请人： Patrick E. Feierabend , John S. Foster , Bryant P. Hichwa , Richard T. Martin , Paul J. Rubel , Kimon Rybnicek , John W. Stocker , Jeffery F. Summers
发明人： Patrick E. Feierabend , John S. Foster , Bryant P. Hichwa , Richard T. Martin , Paul J. Rubel , Kimon Rybnicek , John W. Stocker , Jeffery F. Summers
IPC分类号： G02B626
CPC分类号： G02B6/3564 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B6/4226 , G02B26/0841 , G02B26/085 , G02B2006/12104
摘要： An optical switch is fabricated using micro-electro-mechanical system (“MEMS”) techniques. A thin mirror is fabricated in the major plane of the substrate and rotates about an axis perpendicular to the major plane to move into and out of an optical beam path. The mirror surface is open for chemical polishing and deposition, resulting in a high-quality mirror. In one embodiment, the backside of the mirror is patterned with reinforcing ribs. In another embodiment, a two-sided mirror is fabricated.
摘要翻译： 使用微机电系统（“MEMS”）技术制造光开关。 在基板的主平面上制造薄的反射镜，并且围绕垂直于主平面的轴旋转以进入和离开光束路径。 镜面打开以进行化学抛光和沉积，产生高品质的镜子。 在一个实施例中，镜子的背面被加强肋图案化。 在另一个实施例中，制造双面镜。
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2.发明授权公开(公告)号：US06785038B2
公开(公告)日：2004-08-31
申请号：US09765522
申请日：2001-01-17
申请人： Bryant P. Hichwa , John S. Foster , Richard T. Martin , Paul J. Rubel , John W. Stocker , Jeffery F. Summers
发明人： Bryant P. Hichwa , John S. Foster , Richard T. Martin , Paul J. Rubel , John W. Stocker , Jeffery F. Summers
IPC分类号： G02B2600
CPC分类号： G02B6/3564 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B6/4226 , G02B2006/12104
摘要： An optical cross-connect is fabricated on a substrate using individual MEMs dice with mirrors that rotate into and out of an optical beam path. Each die can be aligned to a single (input-output) pair of collimators in a fiber-optic switching system. An individually accessible magnetic drive on each die provides low power consumption when re-configuring the array in addition to fast switching speeds. The state of each die can be electronically sensed to verify proper array configuration and operation of each die.
摘要翻译： 光学交叉连接使用具有旋转进入和离开光束路径的反射镜的各个MEM骰子在基板上制造。 每个管芯可以与光纤交换系统中的单个（输入 - 输出）准直器对准。 除了快速切换速度之外，每个模具上可单独访问的磁驱动器重新配置阵列时提供低功耗。 可以电子地感测每个管芯的状态，以验证每个管芯的阵列配置和操作。
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公开(公告)号：US06388359B1
公开(公告)日：2002-05-14
申请号：US09517913
申请日：2000-03-03
IPC分类号： H01H5900
CPC分类号： G02B6/357 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/358 , H01H59/0009 , H01H2001/0042
摘要： A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.
摘要翻译： 具有多个连续脉冲的开关信号被施加到MEMS开关。 第一脉冲将开关从第一开关位置移动到第二开关位置。 在选定的停留时段之后，施加第二脉冲以阻止开关的可动部分的振铃或过冲。 在另一个实施例中，使用非对称切换信号将开关从第一状态循环到第二状态，并且返回到第一状态。
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公开(公告)号：US5879519A
公开(公告)日：1999-03-09
申请号：US699612
申请日：1996-08-16
申请人： James W. Seeser , Thomas H. Allen , Eric R. Dickey , Bryant P. Hichwa , Rolf F. Illsley , Robert F. Klinger , Paul M. Lefebvre , Michael A. Scobey , Richard I. Seddon , David L. Soberanis , Michael D. Temple , Craig C. Van Horn , Patrick R. Wentworth
发明人： James W. Seeser , Thomas H. Allen , Eric R. Dickey , Bryant P. Hichwa , Rolf F. Illsley , Robert F. Klinger , Paul M. Lefebvre , Michael A. Scobey , Richard I. Seddon , David L. Soberanis , Michael D. Temple , Craig C. Van Horn , Patrick R. Wentworth
IPC分类号： C23C8/02 , C23C14/00 , C23C14/08 , C23C14/10 , C23C14/34 , C23C14/35 , C23C14/50 , C23C14/56 , C23C14/58
CPC分类号： C23C14/562 , C23C14/0047 , C23C14/0078 , C23C14/083 , C23C14/10 , C23C14/3407 , C23C14/352 , C23C14/505 , C23C14/56 , C23C14/568 , C23C14/58 , C23C8/02
摘要： A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.
摘要翻译： 薄膜涂覆系统包含分离的，单独控制的沉积和反应区，用于沉积材料，例如难熔金属和形成氧化物以及其它化合物和这些材料的合金。 相关联的方法涉及通过差异泵浦，大气分离，顺序或同时操作的沉积和反应区域旋转或平移工件，其特征在于能够通过高通量和受控的涂层厚度形成宽范围的材料，包括两者 恒定和选择性变化的厚度剖面。
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公开(公告)号：US5724175A
公开(公告)日：1998-03-03
申请号：US735431
申请日：1997-01-02
申请人： Bryant P. Hichwa , Richard A. Bradley, Jr. , Steven P. Sapers , Michael J. Cumbo , J. Gordon H. Mathew
发明人： Bryant P. Hichwa , Richard A. Bradley, Jr. , Steven P. Sapers , Michael J. Cumbo , J. Gordon H. Mathew
CPC分类号： G02F1/1533 , G02F1/155
摘要： The present invention is directed to method for manufacturing electrochromic devices using laser ablation techniques. More specifically, the present invention uses laser ablation to provide a simple, noncontact method of patterning electrochromic devices to a controlled depth, to form an electrochromically active area. Furthermore, laser patterning is conducive to the formation of multiple electrochromic devices on a single substrate.
摘要翻译： 本发明涉及使用激光烧蚀技术制造电致变色器件的方法。 更具体地，本发明使用激光烧蚀来提供将电致变色器件图案化为受控深度的简单的非接触方法，以形成电致变色区域。 此外，激光图案化有助于在单个基板上形成多个电致变色器件。
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公开(公告)号：US06625378B2
公开(公告)日：2003-09-23
申请号：US09972023
申请日：2001-10-05
IPC分类号： G02B632
CPC分类号： G02B6/266 , G02F1/157 , G02F2201/02 , G02F2203/02 , G02F2203/48
摘要： A variable optical attenuator device is provided for modulating an optical signal. The attenuator device includes a variable attenuation assembly with an electrochromic structure interposed between a first electrode and a second electrode. The electrochromic structure is configured to reversibly change its optical characteristics from a bleached off state to a colored active state under the influence of an electrical potential applied to the first and second electrodes to thereby modulate the optical signal. The optical attenuator device includes at least one lens attached to the variable attenuation assembly. The lens cooperates with the variable attenuation assembly to direct the optical signal towards the electrochromic structure. Waveguides such as optical fibers define ports at the outer endface of the lens for the optical signal.
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公开(公告)号：US5751489A
公开(公告)日：1998-05-12
申请号：US409279
申请日：1995-03-23
CPC分类号： G02B5/0833 , B60R1/082 , B60R1/083 , G02B7/181 , Y10S359/90
摘要： A elemental mirror for vehicles having a luminous reflectance of at least about 30% includes a substrate coated with a thin layer of elemental semiconductor having an index of refraction of at least 3 and an optical thickness of at least about 275 angstroms. Preferably, the elemental semiconductor coating is sputter coated silicon or germanium and a light absorbing coating is included therebehind. The mirror is spectrally nonselective with elemental semiconductor optical thicknesses of about 275 to 2400 angstroms on the front substrate surface. Spectrally selective mirrors are provided by adding an interference coating to the elemental semiconductor layer coating, preferably of a dielectric such as silicon dioxide or silicon nitride, on either the front or rear substrate surface, or by using a thicker, single elemental semiconductor layer. Instead of an absorbing coating behind the mirror, additional elemental semiconductor and dielectric thin layers may be included to reduce secondary reflections. The method includes coating the thin elemental semiconductor layer on flat glass and heating to harden the layer and make it more scratch resistant, or heating and bending the glass without destroying the reflective properties of the mirror. The thin interference layer, secondary reflection reducing layers, and/or light absorbing coating may be coated before or after heating and bending.
摘要翻译： 具有至少约30％的光反射率的车辆的元素反射镜包括涂覆有折射率至少为3并且至少约275埃的光学厚度的元素半导体薄层的基底。 优选地，元素半导体涂层是溅射涂覆的硅或锗，并且包括光吸收涂层。 镜子是光谱非选择性的，在前衬底表面上的元素半导体光学厚度为约275至2400埃。 通过在衬底表面或后衬底表面上添加干涉涂层来提供元素半导体层涂层，优选电介质如二氧化硅或氮化硅，或通过使用较厚的单个元素半导体层来提供光谱选择性反射镜。 代替反射镜后面的吸收涂层，可以包括另外的元素半导体和电介质薄层以减少次级反射。 该方法包括在平板玻璃上涂覆薄的元素半导体层并加热以使层硬化，使其更具耐擦伤性，或加热和弯曲玻璃而不破坏反射镜的反射特性。 可以在加热和弯曲之前或之后涂覆薄的干涉层，二次反射减少层和/或光吸收涂层。
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公开(公告)号：US5618390A
公开(公告)日：1997-04-08
申请号：US602392
申请日：1996-02-16
CPC分类号： G02F1/1527 , C23C14/08 , Y10T428/29
摘要： A method of depositing a nitrogen-containing electrochromic iridium oxide film by sputtering iridium in an atmosphere comprising oxygen and nitrogen is disclosed for use in producing a transparent electrochromic article. The article includes electroconductive films, e.g., ITO, on two substrates, one of which has a superimposed electrochromic film, e.g., tungsten oxide, and the other of which has superimposed the iridium oxide film of the invention. An ion conductive layer between the electrochromic films completes the article.
摘要翻译： 公开了一种通过在包含氧和氮的气氛中溅射铱来沉积含氮电致变色氧化铱膜的方法，用于制备透明电致变色制品。 该物品在两个基板上包括导电膜，例如ITO，其中一个具有叠加的电致变色膜，例如氧化钨，另一个叠加有本发明的氧化铱膜。 电致变色膜之间的离子传导层完成了制品。
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公开(公告)号：US06303885B1
公开(公告)日：2001-10-16
申请号：US09517649
申请日：2000-03-03
申请人： Bryant P. Hichwa , Cornel Marxer , Michael Gale
发明人： Bryant P. Hichwa , Cornel Marxer , Michael Gale
IPC分类号： H01H5700
CPC分类号： G02B6/358 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/3584 , H01H59/0009 , H01H2001/0042
摘要： A bi-stable micro-machined electromechanical system (“MEMS”) switch. In a preferred embodiment, the bi-stable MEMS switch is used in an N×N optical signal switching system. Spring arms act in conjunction with a hollow beam portion of a movable center body of the switch to accommodate strain in the arms as the switch is moved from a first position to a second position, thus avoiding buckling of the spring arms. Both the first and second switch position occur at local minimums of mechanical potential energy, thus providing two stable switch states. The center body is moved in relation to static portions of the switch by an actuator, such as an electro-static comb drive.
摘要翻译： 双稳态微机电系统（“MEMS”）开关。 在优选实施例中，双稳态MEMS开关用于NxN光信号交换系统。 弹簧臂与开关的可移动中心体的中空梁部一起作用，以在开关从第一位置移动到第二位置时适应臂中的应变，从而避免弹簧臂的翘曲。 第一和第二开关位置都以机械势能的局部最小值发生，从而提供两个稳定的开关状态。 相对于开关的静止部分，中心体通过诸如静电梳状驱动器的致动器移动。
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公开(公告)号：US5618388A
公开(公告)日：1997-04-08
申请号：US317781
申请日：1994-10-04
申请人： James W. Seeser , Thomas H. Allen , Eric R. Dickey , Bryant P. Hichwa , Rolf F. Illsley , Robert F. Klinger , Paul M. LeFebvre , Michael A. Scobey , Richard I. Seddon , David L. Soberanis , Michael D. Temple , Craig C. Van Horn , Patrick R. Wentworth
发明人： James W. Seeser , Thomas H. Allen , Eric R. Dickey , Bryant P. Hichwa , Rolf F. Illsley , Robert F. Klinger , Paul M. LeFebvre , Michael A. Scobey , Richard I. Seddon , David L. Soberanis , Michael D. Temple , Craig C. Van Horn , Patrick R. Wentworth
IPC分类号： C23C8/02 , C23C14/00 , C23C14/08 , C23C14/10 , C23C14/34 , C23C14/35 , C23C14/50 , C23C14/56 , C23C14/58
CPC分类号： C23C14/562 , C23C14/0047 , C23C14/0078 , C23C14/083 , C23C14/10 , C23C14/3407 , C23C14/352 , C23C14/505 , C23C14/56 , C23C14/568 , C23C14/58 , C23C8/02
摘要： A thin film coating system incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or translating workpieces past the differentially pumped, atmospherically separated, sequentially or simultaneously operated deposition and reaction zones and is characterized by the ability to form a wide range of materials, by high throughput, and by controlled coating thickness, including both constant and selectively varied thickness profiles.
摘要翻译： 薄膜涂覆系统包含分离的，单独控制的沉积和反应区，用于沉积材料，例如难熔金属和形成氧化物以及其它化合物和这些材料的合金。 相关联的方法涉及通过差异泵浦，大气分离，顺序或同时操作的沉积和反应区域旋转或平移工件，其特征在于能够通过高通量和受控的涂层厚度形成宽范围的材料，包括两者 恒定和选择性变化的厚度剖面。
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