发明授权
US06806494B2 Method and apparatus for wafer-level burn-in and testing of integrated circuits 失效
用于晶圆级老化和集成电路测试的方法和装置

  • 专利标题: Method and apparatus for wafer-level burn-in and testing of integrated circuits
  • 专利标题(中): 用于晶圆级老化和集成电路测试的方法和装置
  • 申请号: US10445547
    申请日: 2003-05-27
  • 公开(公告)号: US06806494B2
    公开(公告)日: 2004-10-19
  • 发明人: Andreas A. FennerDavid L. Thompson
  • 申请人: Andreas A. FennerDavid L. Thompson
  • 主分类号: H01L2358
  • IPC分类号: H01L2358
Method and apparatus for wafer-level burn-in and testing of integrated circuits
摘要:
In one embodiment, a testing regimen is implemented to reduce test time. Specifically, a structure and method to power up and stabilize all die on the wafer prior to testing each die is implemented. More specifically, parallel powering schemes including die stabilization procedures are used to ready the wafer for testing. A wafer probe tester is indexed from one die to the next for an uninterrupted testing of all die in the wafer subsequent to all die power up and stabilization.
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