Invention Grant
US06807454B2 Method for automatically controlling defect -specification in a semiconductor manufacturing process 有权
在半导体制造过程中自动控制缺陷指定的方法

  • Patent Title: Method for automatically controlling defect -specification in a semiconductor manufacturing process
  • Patent Title (中): 在半导体制造过程中自动控制缺陷指定的方法
  • Application No.: US10249103
    Application Date: 2003-03-17
  • Publication No.: US06807454B2
    Publication Date: 2004-10-19
  • Inventor: Sheng-Jen WangLong-Hui Lin
  • Applicant: Sheng-Jen WangLong-Hui Lin
  • Priority: TW91109606A 20020508
  • Main IPC: G06F1900
  • IPC: G06F1900
Method for automatically controlling defect -specification in a semiconductor manufacturing process
Abstract:
A method for automatically controlling defect-specification in a semiconductor manufacturing process is provided. The method provides a module to detect a position, number, size, and intensity signals of defects on a processed patterned wafer. The module further compares the patterned wafer with a normal wafer to preliminarily classify the patterned wafer and creates a defect map. Then, a defect management system is provided to execute a spatial pattern recognition procedure to determine whether or not the corresponding special pattern can be recognized. Finally, messages will be automatically sent by the defect management system to inform related e-mail accounts according to results of the recognition of the special pattern.
Information query
Patent Agency Ranking
0/0