Invention Grant
- Patent Title: Method for automatically controlling defect -specification in a semiconductor manufacturing process
- Patent Title (中): 在半导体制造过程中自动控制缺陷指定的方法
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Application No.: US10249103Application Date: 2003-03-17
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Publication No.: US06807454B2Publication Date: 2004-10-19
- Inventor: Sheng-Jen Wang , Long-Hui Lin
- Applicant: Sheng-Jen Wang , Long-Hui Lin
- Priority: TW91109606A 20020508
- Main IPC: G06F1900
- IPC: G06F1900

Abstract:
A method for automatically controlling defect-specification in a semiconductor manufacturing process is provided. The method provides a module to detect a position, number, size, and intensity signals of defects on a processed patterned wafer. The module further compares the patterned wafer with a normal wafer to preliminarily classify the patterned wafer and creates a defect map. Then, a defect management system is provided to execute a spatial pattern recognition procedure to determine whether or not the corresponding special pattern can be recognized. Finally, messages will be automatically sent by the defect management system to inform related e-mail accounts according to results of the recognition of the special pattern.
Public/Granted literature
- US20030212469A1 METHOD FOR AUTOMATICALLY CONTROLLING DEFECT -SPECIFICATION IN A SEMICONDUCTOR MANUFACTURING PROCESS Public/Granted day:2003-11-13
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