Invention Grant
- Patent Title: Process for fabricating composite substrate carrier
- Patent Title (中): 制造复合衬底载体的工艺
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Application No.: US10212459Application Date: 2002-08-05
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Publication No.: US06808668B2Publication Date: 2004-10-26
- Inventor: Sanjiv M. Bhatt , Shawn D. Eggum
- Applicant: Sanjiv M. Bhatt , Shawn D. Eggum
- Main IPC: B29C4514
- IPC: B29C4514

Abstract:
A process for manufacturing a wafer carrier including injection molding a wafer support structure. The wafer support structure has a plurality of wafer support shelves extending therefrom. The process further includes molding a wafer contact portion on each of the wafer support shelves. The wafer contact portions bond with the wafer support shelves without mechanical fasteners between the wafer contact portions and the wafer support shelves. The process also includes overmolding a shell over the wafer support structure to form the wafer carrier. The shell bonds with the wafer support structure without mechanical fasteners between the shell and the wafer support structure. The wafer contact portions define a plurality of slots for holding a plurality of wafers.
Public/Granted literature
- US20030025244A1 Process for fabricating composite substrate carrier Public/Granted day:2003-02-06
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