Invention Grant
US06812518B2 Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same
失效
具有存储多个位的存储单元的半导体存储器及其制造方法
- Patent Title: Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same
- Patent Title (中): 具有存储多个位的存储单元的半导体存储器及其制造方法
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Application No.: US10285540Application Date: 2002-11-01
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Publication No.: US06812518B2Publication Date: 2004-11-02
- Inventor: Takashi Miida
- Applicant: Takashi Miida
- Priority: JP2001-336822 20011101; JP2002-303845 20021018
- Main IPC: H10L29788
- IPC: H10L29788

Abstract:
A multiple-bit cell transistor includes a P type silicon substrate, agate insulation layer, a pair of N type source/drain regions, a pair of tunnel insulation layers, and a pair of floating gates. The silicon substrate is formed with a projection while the floating gates each are positioned on one of opposite side walls of the projection. Inter-polycrystalline insulation layers each are formed on one of the floating gates. A control gate faces the top of the projection via the gate insulation layer. An N type region is formed on each side of the projection and contacts the source/drain region adjoining it. The cell transistor lowers a required write voltage, broadens a current window, and enhances resistance to inter-band tunneling.
Public/Granted literature
- US20030080356A1 Semiconductor memory having storage cells storing multiple bits and a method of manufacturing the same Public/Granted day:2003-05-01
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